Issued Patents All Time
Showing 1–25 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237174 | Etching method | Kazunori Shinoda, Hirotaka Hamamura, Kenji Maeda, Kenji Ishikawa, Masaru Hori | 2025-02-25 |
| 11915951 | Plasma processing method | Hiroyuki Kobayashi, Nobuya Miyoshi, Kazunori Shinoda, Tatehito Usui, Naoyuki Kofuji +4 more | 2024-02-27 |
| 11842885 | Plasma processing apparatus and plasma processing method | Tooru Aramaki, Masaru Izawa | 2023-12-12 |
| 11682542 | Plasma processing device | Tooru Aramaki, Masaru Izawa | 2023-06-20 |
| 11424106 | Plasma processing apparatus | Yuki Kondo, Masahito Mori, Satoshi Une, Kazunori Nakamoto | 2022-08-23 |
| 11398371 | Plasma processing apparatus | Naoyuki Kofuji, Taku Iwase | 2022-07-26 |
| 11355322 | Plasma processing apparatus and plasma processing method | Taku Iwase, Masahito Mori, Takao Arase | 2022-06-07 |
| 11094509 | Plasma processing apparatus | Makoto Satake, Tadayoshi Kawaguchi, Takamasa Ichino | 2021-08-17 |
| 10930476 | Plasma processing device | Tooru Aramaki, Masaru Izawa | 2021-02-23 |
| 10825664 | Wafer processing method and wafer processing apparatus | Tomoyuki Watanabe, Yutaka Kouzuma, Takumi Tandou, Hiroshi Ito | 2020-11-03 |
| 10825657 | Plasma processing apparatus | Masakazu Isozaki, Masahito Mori | 2020-11-03 |
| 10811231 | Plasma processing apparatus and plasma processing method | Tooru Aramaki, Masaru Izawa | 2020-10-20 |
| 10804080 | Plasma processing apparatus and plasma processing method | Tooru Aramaki | 2020-10-13 |
| 10741368 | Plasma processing apparatus | Takumi Tandou, Takamasa Ichino | 2020-08-11 |
| D891636 | Ring for a plasma processing apparatus | Masakazu Isozaki, Masahito Mori, Takao Arase, Taku Iwase | 2020-07-28 |
| D871609 | Electrode plate peripheral ring for a plasma processing apparatus | Masakazu Isozaki, Masahito Mori, Takao Arase, Takahisa Hashimoto | 2019-12-31 |
| D870314 | Electrode cover for a plasma processing apparatus | Masakazu Isozaki, Masahito Mori, Takao Arase, Yousuke Sakai | 2019-12-17 |
| D868993 | Electrode plate for a plasma processing apparatus | Masakazu Isozaki, Masahito Mori, Takao Arase, Takahisa Hashimoto | 2019-12-03 |
| 10243140 | Manufacturing method of magnetoresistive element and vacuum processing apparatus | Makoto Satake, Masaki Yamada | 2019-03-26 |
| 10217611 | Plasma processing apparatus and plasma processing method | Tooru Aramaki, Masaru Izawa | 2019-02-26 |
| 10141207 | Operation method of plasma processing apparatus | Yutaka Kouzuma, Hiroyuki Kobayashi, Nobuya Miyoshi, Tomoyuki Watanabe | 2018-11-27 |
| 10037909 | Plasma processing apparatus | Tooru Aramaki, Michikazu Morimoto | 2018-07-31 |
| 9887070 | Plasma processing apparatus and plasma processing method | Takao Arase, Masahito Mori, Yuusuke Takegawa, Takamasa Ichino | 2018-02-06 |
| 9779919 | Plasma processing apparatus and plasma processing method | Takao Arase, Masahito Mori, Yuusuke Takegawa, Takamasa Ichino | 2017-10-03 |
| 9368377 | Plasma processing apparatus | Takumi Tandou, Masaru Izawa | 2016-06-14 |