Issued Patents All Time
Showing 51–55 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6573190 | Dry etching device and dry etching method | Masaru Izawa, Shinichi Tachi, Nobuyuki Negishi, Naoyuki Kofuji | 2003-06-03 |
| 6511608 | Plasma processing method | Masahito Mori, Shinichi Tachi | 2003-01-28 |
| 6475918 | Plasma treatment apparatus and plasma treatment method | Masaru Izawa, Nobuyuki Negishi, Yoshinori Momonoi, Shinichi Tachi | 2002-11-05 |
| 6136214 | Plasma processing method and apparatus | Masahito Mori, Shinichi Tachi | 2000-10-24 |
| 5554257 | Method of treating surfaces with atomic or molecular beam | Yoshimi Kawanami, Tatsumi Mizutani | 1996-09-10 |