Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10418224 | Plasma etching method | Naoyuki Kofuji, Ken'etsu Yokogawa, Masami Kamibayashi, Masatoshi Miyake | 2019-09-17 |
| 9960014 | Plasma etching method | Naoyuki Kofuji, Ken'etsu Yokogawa, Masami Kamibayashi, Masatoshi Miyake | 2018-05-01 |
| 9099349 | Semiconductor device manufacturing method | Naoyuki Kofuji, Hiroaki Ishimura | 2015-08-04 |
| 8747763 | Plasma sterilization apparatus | Takumi Tandou, Hiroyuki Kobayashi, Keizo Suzuki | 2014-06-10 |
| 7585776 | Dry etching method of insulating film | Masatoshi Oyama, Masahiro Sumiya | 2009-09-08 |
| 7372582 | Method for fabrication semiconductor device | Kenetsu Yokogawa, Masaru Izawa | 2008-05-13 |
| 7371690 | Dry etching method and apparatus | Masaru Izawa, Kenetsu Yokogawa | 2008-05-13 |
| 6842658 | Method of manufacturing a semiconductor device and manufacturing system | Masaru Izawa, Masahito Mori, Shinichi Tachi | 2005-01-11 |
| 6645870 | Process for fabricating semiconductor device | Masaru Izawa | 2003-11-11 |
| 6573190 | Dry etching device and dry etching method | Masaru Izawa, Shinichi Tachi, Kenetsu Yokogawa, Naoyuki Kofuji | 2003-06-03 |
| 6551445 | Plasma processing system and method for manufacturing a semiconductor device by using the same | Ken'etsu Yokogawa, Yoshinori Momonoi, Masaru Izawa, Shinichi Tachi | 2003-04-22 |
| 6475918 | Plasma treatment apparatus and plasma treatment method | Masaru Izawa, Kenetsu Yokogawa, Yoshinori Momonoi, Shinichi Tachi | 2002-11-05 |
| 5525911 | Vertical probe tester card with coaxial probes | Hiroshi Marumo, Satoru Yamashita, Shoichi Kanai | 1996-06-11 |