Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10418224 | Plasma etching method | Naoyuki Kofuji, Ken'etsu Yokogawa, Nobuyuki Negishi, Masatoshi Miyake | 2019-09-17 |
| 9960014 | Plasma etching method | Naoyuki Kofuji, Ken'etsu Yokogawa, Nobuyuki Negishi, Masatoshi Miyake | 2018-05-01 |