Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665448 | Plasma processing apparatus | Masahito Mori, Takao Arase | 2020-05-26 |
| 10418224 | Plasma etching method | Naoyuki Kofuji, Nobuyuki Negishi, Masami Kamibayashi, Masatoshi Miyake | 2019-09-17 |
| 9960014 | Plasma etching method | Naoyuki Kofuji, Nobuyuki Negishi, Masami Kamibayashi, Masatoshi Miyake | 2018-05-01 |
| 9490104 | Heat treatment apparatus | Masatoshi Miyake, Takashi Uemura, Masaru Izawa, Satoshi Sakai | 2016-11-08 |
| 9271341 | Heat treatment apparatus that performs defect repair annealing | Masatoshi Miyake | 2016-02-23 |
| 8809727 | Heat treatment apparatus | Masatoshi Miyake | 2014-08-19 |
| 8569647 | Heat treatment apparatus | Masatoshi Miyake | 2013-10-29 |
| 8034181 | Plasma processing apparatus | Takumi Tandou, Masaru Izawa | 2011-10-11 |
| 7838792 | Plasma processing apparatus capable of adjusting temperature of sample stand | Takumi Tandou, Seiichiro Kanno, Masaru Izawa | 2010-11-23 |
| 7771564 | Plasma processing apparatus | Takumi Tandou, Seiichiro Kanno | 2010-08-10 |
| 7048869 | Plasma processing apparatus and a plasma processing method | Kazue Takahashi, Toshio Masuda, Tetsunori Kaji | 2006-05-23 |
| 6551445 | Plasma processing system and method for manufacturing a semiconductor device by using the same | Yoshinori Momonoi, Nobuyuki Negishi, Masaru Izawa, Shinichi Tachi | 2003-04-22 |
| 6033481 | Plasma processing apparatus | Tetsuo Ono, Kazunori Tsujimoto, Naoshi Itabashi, Masahito Mori, Shinichi Tachi +1 more | 2000-03-07 |
| 5891252 | Plasma processing apparatus | Tetsuo Ono, Kazunori Tsujimoto, Naoshi Itabashi, Masahito Mori, Shinichi Tachi +1 more | 1999-04-06 |
| 5291145 | Microwave processing equipment | Yusuke Yajima | 1994-03-01 |