Issued Patents All Time
Showing 25 most recent of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11181502 | Hole formation method and measurement device | Sonoko Migitaka, Itaru Yanagi, Rena AKAHORI, Kenichi Takeda | 2021-11-23 |
| 11130985 | Spot array substrate, method for producing same, and nucleic acid polymer analysis method and device | Sonoko Migitaka, Masatoshi Narahara, Tomohiro Shoji, Yukio Ono | 2021-09-28 |
| 10481125 | Biomolecule measuring device | Takayuki Kawahara, Yoshimitsu Yanagawa, Riichiro Takemura | 2019-11-19 |
| 10451584 | Biomolecule measuring device | Yoshimitsu Yanagawa, Takahide YOKOI, Takayuki Kawahara, Sonoko Migitaka, Makiko Yoshida +1 more | 2019-10-22 |
| 10031083 | Fixed position controller and method | Michiru FUJIOKA, Tsuyoshi Sonehara | 2018-07-24 |
| 9997337 | Plasma processing method and plasma processing apparatus | Masahito Mori, Naoyuki Kofuji | 2018-06-12 |
| 9759681 | Biomolecule detection method, biomolecule detection device and analysis device | Toshiro Saito, Kenta Imai, Kyoko Imai, Kazumichi Imai, Itaru Yanagi +2 more | 2017-09-12 |
| 9702695 | Image processing device, charged particle beam device, charged particle beam device adjustment sample, and manufacturing method thereof | Hiroki Kawada, Osamu Inoue, Miyako Matsui, Takahiro Kawasaki, Takashi Takahama +2 more | 2017-07-11 |
| 9293300 | Plasma processing apparatus | Hiroyuki Kobayashi, Hideyuki Nagaishi, Takumi Tandou | 2016-03-22 |
| 9076637 | Plasma processing method and plasma processing apparatus | Masahito Mori, Naoyuki Kofuji | 2015-07-07 |
| 9034270 | Plasma sterilization and cleaning treatment device for escalator, and escalator using the same | Hiroyuki Kobayashi, Takumi Tandou | 2015-05-19 |
| 8926790 | Plasma processing apparatus | Tsutomu Tetsuka, Toshio Masuda, Masanori Kadotani, Takashi Fujii | 2015-01-06 |
| 8865403 | Nucleic acid analyzing device and nucleic acid analyzer | Masatoshi Narahara, Toshiro Saito, Jiro Yamamoto, Hiroyuki Uchiyama | 2014-10-21 |
| 8546266 | Plasma processing method and plasma processing apparatus | Masahito Mori, Naoyuki Kofuji | 2013-10-01 |
| 8282767 | Plasma processing apparatus | Tsutomu Tetsuka, Seiichiro Kanno, Motohiko Yoshigai | 2012-10-09 |
| 8129283 | Plasma processing method and plasma processing apparatus | Masahito Mori, Naoyuki Kofuji | 2012-03-06 |
| 7931776 | Plasma processing apparatus | Tsutomu Tetsuka, Seiichiro Kanno, Motohiko Yoshigai | 2011-04-26 |
| 7908104 | Plasma processing apparatus and method for detecting status of said apparatus | Tsutomu Tetsuka, Atsushi Itou | 2011-03-15 |
| 7771607 | Plasma processing apparatus and plasma processing method | Tsutomu Tetsuka, Kazuyuki Ikenaga, Tetsuo Ono, Motohiko Yoshigai | 2010-08-10 |
| 7604709 | Plasma processing apparatus | Masaru Kurihara, Naoyuki Kofuji, Takashi Tsutsumi | 2009-10-20 |
| 7601241 | Plasma processing apparatus and plasma processing method | Tsutomu Tetsuka, Kazuyuki Ikenaga, Tetsuo Ono, Motohiko Yoshigai | 2009-10-13 |
| 7442651 | Plasma etching method | Masahito Mori, Toshiaki Nishida, Motohiko Yoshigai, Hideyuki Kazumi, Kazutami Tago | 2008-10-28 |
| 7396771 | Plasma etching apparatus and plasma etching method | Go Miya, Seiichiro Kanno, Motohiko Yoshigai, Junichi Tanaka, Masahito Mori +2 more | 2008-07-08 |
| 6797112 | Plasma treatment apparatus and method of producing semiconductor device using the apparatus | Naoyuki Kofuji, Yasunori Goto | 2004-09-28 |
| 6673685 | Method of manufacturing semiconductor devices | Masahito Mori, Masaru Izawa | 2004-01-06 |