Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11875978 | Plasma processing apparatus and plasma processing method | Tsubasa Okamoto, Tatehito Usui, Shigeru Nakamoto, Naohiro Kawamoto, Atsushi Sekiguchi | 2024-01-16 |
| 11462416 | Plasma processing method and plasma processing apparatus | Kenichi Kuwahara, Tatehito Usui, Hiroyuki Kobayashi | 2022-10-04 |
| 10971369 | Plasma processing method and plasma processing apparatus | Tatehito Usui, Masaru Izawa, Kenichi Kuwahara | 2021-04-06 |
| 10665516 | Etching method and plasma processing apparatus | Kenichi Kuwahara, Naoki Yasui, Masaru Izawa, Tatehito Usui, Takeshi Ohmori | 2020-05-26 |
| 9702695 | Image processing device, charged particle beam device, charged particle beam device adjustment sample, and manufacturing method thereof | Hiroki Kawada, Osamu Inoue, Takahiro Kawasaki, Naoshi Itabashi, Takashi Takahama +2 more | 2017-07-11 |
| 7368713 | Method and apparatus for inspecting semiconductor device | — | 2008-05-06 |
| 6753524 | Inspection system and inspection process for wafer with circuit using charged-particle beam | Mari Nozoe | 2004-06-22 |
| 6700122 | Wafer inspection system and wafer inspection process using charged particle beam | Mari Nozoe, Atsuko Takafuji | 2004-03-02 |
| 5981399 | Method and apparatus for fabricating semiconductor devices | Yoshio Kawamura, Tatuharu Yamamoto, Shigeo Moriyama, Yoshifumi Kawamoto, Natsuki Yokoyama +2 more | 1999-11-09 |