Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6518548 | Substrate temperature control system and method for controlling temperature of substrate | Masakazu Sugaya, Fumio Murai, Yutaka Kaneko, Masafumi Kanetomo, Shigeki Hirasawa +2 more | 2003-02-11 |
| 6394797 | Substrate temperature control system and method for controlling temperature of substrate | Masakazu Sugaya, Fumio Murai, Yutaka Kaneko, Masafumi Kanetomo, Shigeki Hirasawa +2 more | 2002-05-28 |
| 5981399 | Method and apparatus for fabricating semiconductor devices | Yoshio Kawamura, Shigeo Moriyama, Yoshifumi Kawamoto, Natsuki Yokoyama, Fumihiko Uchida +2 more | 1999-11-09 |
| 5628828 | Processing method and equipment for processing a semiconductor device having holder/carrier with flattened surface | Yoshio Kawamura, Shigeo Moriyama, Fumihiko Uchida | 1997-05-13 |