Issued Patents All Time
Showing 1–25 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7603194 | Fabrication system and fabrication method | Natsuki Yokoyama, Yoshifumi Kawamoto, Eiichi Murakami, Fumihiko Uchida, Kenichi Mizuishi | 2009-10-13 |
| 7392106 | Fabrication system and fabrication method | Natsuki Yokoyama, Yoshifumi Kawamoto, Eiichi Murakami, Fumihiko Uchida, Kenichi Mizuishi | 2008-06-24 |
| 7310563 | Fabrication system and fabrication method | Natsuki Yokoyama, Yoshifumi Kawamoto, Eiichi Murakami, Fumihiko Uchida, Kenichi Mizuishi | 2007-12-18 |
| 7062344 | Fabrication system and fabrication method | Natsuki Yokoyama, Yoshifumi Kawamoto, Eiichi Murakami, Fumihiko Uchida, Kenichi Mizuishi | 2006-06-13 |
| 6777337 | Planarizing method of semiconductor wafer and apparatus thereof | Kan Yasui, Souichi Katagiri, Masayuki Nagasawa, Ui Yamaguchi | 2004-08-17 |
| 6734103 | Method of polishing a semiconductor device | Souichi Katagiri, Ui Yamaguchi, Seiichi Kondo, Kan Yasui | 2004-05-11 |
| 6723144 | Semiconductor device fabricating method | Souichi Katagiri, Kan Yasui, Ryousei Kawai, Sadayuki Nishimura, Masahiko Sato +1 more | 2004-04-20 |
| 6663468 | Method for polishing surface of semiconductor device substrate | Kan Yasui, Masahiko Sato, Souichi Katagiri, Masayuki Nagasawa, Kunio Harada +2 more | 2003-12-16 |
| 6612912 | Method for fabricating semiconductor device and processing apparatus for processing semiconductor device | Kan Yasui, Souichi Katagiri, Shigeo Moriyama, Ryousei Kawai, Sadayuki Nishimura +1 more | 2003-09-02 |
| 6589871 | Processing method, measuring method and producing method of semiconductor devices | Souichi Katagiri, Kan Yasui, Masayuki Nagasawa, Ui Yamaguchi | 2003-07-08 |
| 6565424 | Method and apparatus for planarizing semiconductor device | Souichi Katagiri, Kan Yasui, Masayuki Nagasawa, Ui Yamaguchi | 2003-05-20 |
| 6524961 | Semiconductor device fabricating method | Souichi Katagiri, Kan Yasui, Ryousei Kawai, Sadayuki Nishimura, Masahiko Sato +1 more | 2003-02-25 |
| 6099598 | Fabrication system and fabrication method | Natsuki Yokoyama, Yoshifumi Kawamoto, Eiichi Murakami, Fumihiko Uchida, Kenichi Mizuishi | 2000-08-08 |
| 6091219 | Structure of robot control system | Satoshi Maruo, Takamitsu Inagaki, Akira Ogawa, Noritaka Yatsuya, Masatoshi Kojima | 2000-07-18 |
| 6077027 | Semiconductor manufacturing apparatus for transferring articles with a bearing-less joint and method for manufacturing semiconductor device | Hideo Kashima, Shigeo Moriyama | 2000-06-20 |
| 5981399 | Method and apparatus for fabricating semiconductor devices | Tatuharu Yamamoto, Shigeo Moriyama, Yoshifumi Kawamoto, Natsuki Yokoyama, Fumihiko Uchida +2 more | 1999-11-09 |
| 5971701 | Semiconductor manufacturing apparatus for transferring articles with a bearing-less joint and method for manufacturing semiconductor device | Hideo Kashima, Shigeo Moriyama | 1999-10-26 |
| 5858863 | Fabrication system and method having inter-apparatus transporter | Natsuki Yokoyama, Yoshifumi Kawamoto, Eiichi Murakami, Fumihiko Uchida, Kenichi Mizuishi | 1999-01-12 |
| 5820679 | Fabrication system and method having inter-apparatus transporter | Natsuki Yokoyama, Yoshifumi Kawamoto, Eiichi Murakami, Fumihiko Uchida, Kenichi Mizuishi | 1998-10-13 |
| 5736824 | Motor control apparatus | Tetsuya Sato | 1998-04-07 |
| 5628828 | Processing method and equipment for processing a semiconductor device having holder/carrier with flattened surface | Shigeo Moriyama, Tatuharu Yamamoto, Fumihiko Uchida | 1997-05-13 |
| 5609511 | Polishing method | Shigeo Moriyama, Yoshio Homma, Kikuo Kusukawa, Takeshi Furusawa | 1997-03-11 |
| 5601686 | Wafer transport method | Yoshifumi Kawamoto, Fumihiko Uchida, Kenichi Mizuishi, Natsuki Yokoyama, Eiichi Murakami +2 more | 1997-02-11 |
| 5562800 | Wafer transport method | Yoshifumi Kawamoto, Fumihiko Uchida, Kenichi Mizuishi, Natsuki Yokoyama, Eiichi Murakami +2 more | 1996-10-08 |
| 5548454 | Information recording disk, its production method and recording apparatus | Youichi Kawakubo, Yosuke Seo | 1996-08-20 |