Issued Patents All Time
Showing 1–25 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7526352 | Semiconductor production system | Hidemitsu Naya, Rikio Tomiyoshi, Mutsumi Kikuchi, Kotaro Shimamura | 2009-04-28 |
| 7166013 | Polishing apparatus and method for producing semiconductors using the apparatus | Yoshihiro Ishida, Takashi Kugaya, Shigeo Ootsuki, Soichi Katagiri, Sadayuki Nishimura +2 more | 2007-01-23 |
| 7137866 | Polishing apparatus and method for producing semiconductors using the apparatus | Yoshihiro Ishida, Takashi Kugaya, Shigeo Ootsuki, Soichi Katagiri, Sadayuki Nishimura +2 more | 2006-11-21 |
| 7026245 | Polishing agent and polishing method | Yoshio Homma, Kikuo Kusukawa, Masayuki Nagasawa | 2006-04-11 |
| 6850854 | Semiconductor production system | Hidemitsu Naya, Rikio Tomiyoshi, Mutsumi Kikuchi, Kotaro Shimamura | 2005-02-01 |
| 6723144 | Semiconductor device fabricating method | Souichi Katagiri, Kan Yasui, Ryousei Kawai, Sadayuki Nishimura, Masahiko Sato +1 more | 2004-04-20 |
| 6676496 | Apparatus for processing semiconductor wafers | Kan Yasui, Katsuhiko Yamaguchi, Yoshio Homma | 2004-01-13 |
| 6612912 | Method for fabricating semiconductor device and processing apparatus for processing semiconductor device | Kan Yasui, Souichi Katagiri, Yoshio Kawamura, Ryousei Kawai, Sadayuki Nishimura +1 more | 2003-09-02 |
| 6591207 | Semiconductor production system | Hidemitsu Naya, Rikio Tomiyoshi, Mutsumi Kikuchi, Kotaro Shimamura | 2003-07-08 |
| 6524961 | Semiconductor device fabricating method | Souichi Katagiri, Kan Yasui, Ryousei Kawai, Sadayuki Nishimura, Masahiko Sato +1 more | 2003-02-25 |
| 6478977 | Polishing method and apparatus | Katsuhiko Yamaguchi, Yoshio Homma, Sunao Matsubara, Yoshihiro Ishida, Ryousei Kawa-ai | 2002-11-12 |
| 6336842 | Rotary machining apparatus | Shigeo Ootsuki, Takashi Kugaya, Kenichi Togawa, Makoto Kajiwara, Shyuichi Oowada +2 more | 2002-01-08 |
| 6221773 | Method for working semiconductor wafer | Kan Yasui, Katsuhiko Yamaguchi, Yoshio Homma | 2001-04-24 |
| 6180020 | Polishing method and apparatus | Katsuhiko Yamaguchi, Yoshio Homma, Sunao Matsubara, Yoshihiro Ishida, Ryousei Kawa-ai | 2001-01-30 |
| 6099393 | Polishing method for semiconductors and apparatus therefor | Soichi Katagiri, Kan Yasui, Katsuhiko Yamaguchi | 2000-08-08 |
| 6077027 | Semiconductor manufacturing apparatus for transferring articles with a bearing-less joint and method for manufacturing semiconductor device | Yoshio Kawamura, Hideo Kashima | 2000-06-20 |
| 6043155 | Polishing agent and polishing method | Yoshio Homma, Kikuo Kusukawa, Masayuki Nagasawa | 2000-03-28 |
| 5981399 | Method and apparatus for fabricating semiconductor devices | Yoshio Kawamura, Tatuharu Yamamoto, Yoshifumi Kawamoto, Natsuki Yokoyama, Fumihiko Uchida +2 more | 1999-11-09 |
| 5971701 | Semiconductor manufacturing apparatus for transferring articles with a bearing-less joint and method for manufacturing semiconductor device | Yoshio Kawamura, Hideo Kashima | 1999-10-26 |
| 5772780 | Polishing agent and polishing method | Yoshio Homma, Kikuo Kusukawa, Masayuki Nagasawa | 1998-06-30 |
| 5658115 | Transfer apparatus | Takashi Yamazaki, Hiroyuki Sakai, Hiroshi Sugano | 1997-08-19 |
| 5628828 | Processing method and equipment for processing a semiconductor device having holder/carrier with flattened surface | Yoshio Kawamura, Tatuharu Yamamoto, Fumihiko Uchida | 1997-05-13 |
| 5609511 | Polishing method | Yoshio Kawamura, Yoshio Homma, Kikuo Kusukawa, Takeshi Furusawa | 1997-03-11 |
| 5563465 | Actuator | Hitoshi Nakahara, Masakazu Ichikawa, Yuishin Tanaka, Sakae Saitou | 1996-10-08 |
| 5411430 | Scanning optical device and method for making a hybrid scanning lens used therefor | Takashi Nishimura, Akira Arimoto, Yoshinori Miyamura, Yumiko Anzai, Yoshimasa Kondo +1 more | 1995-05-02 |