Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5408320 | Workpiece having alignment marks for positioning a pattern at a different pitch to be formed thereon, and method for fabricating the same | Soichi Katagiri, Tsuneo Terasawa, Masaaki Itou | 1995-04-18 |
| 5305364 | Projection type X-ray lithography apparatus | Kozo Mochiji, Hiroaki Oizumi, Shinji Okazaki, Tsuneo Terasawa, Masaaki Itou | 1994-04-19 |
| 5272744 | Reflection mask | Masaaki Itou, Hiroaki Oizumi | 1993-12-21 |
| 5222112 | X-ray pattern masking by a reflective reduction projection optical system | Tsuneo Terasawa, Masaaki Itou, Soichi Katagiri, Hiroshi Fukuda | 1993-06-22 |
| 5200798 | Method of position detection and the method and apparatus of printing patterns by use of the position detection method | Soichi Katagiri, Tsuneo Terasawa, Masaaki Itou | 1993-04-06 |
| 5107628 | Method of fabricating article having aspheric figure and tool for use in carrying out the method | Yoshimasa Kondo, Akira Arimoto, Koji Takahashi, Kenichi Kugai | 1992-04-28 |
| 5025268 | Optical scanning apparatus and asymmetrical aspheric scanning lens | Akira Arimoto, Susumu Saito, Yoshito Tsunoda, Takeshi Mochizuki | 1991-06-18 |
| 4984259 | X-ray exposure apparatus | Masaaki Itou | 1991-01-08 |
| 4818351 | Method for the surface treatment of an iron or iron alloy article | Tohru Arai, Hironori Fujita, Yoshihiko Sugimoto, Yukio Ohta, Akira Sato | 1989-04-04 |
| 4804445 | Method for the surface treatment of an iron or iron alloy article | Yukio Ohta, Akira Sato, Tohru Arai, Hironori Fujita, Yoshihiko Sugimoto | 1989-02-14 |
| 4798470 | Pattern printing method and apparatus | Toshiei Kurosaki, Tsuneo Terasawa, Shinji Okazaki, Yoshio Kawamura | 1989-01-17 |
| 4739161 | Fine displacement transducer employing plural optical fibers | Fumihiko Uchida | 1988-04-19 |
| 4575942 | Ultra-precision two-dimensional moving apparatus | — | 1986-03-18 |
| 4522660 | Process for ion nitriding of aluminum or an aluminum alloy and apparatus therefor | Takatoshi Suzuki, Hideo Tachikawa | 1985-06-11 |
| 4409860 | Apparatus for precisely moving a table | Masaaki Ito, Tatsuo Harada | 1983-10-18 |
| 4358198 | Apparatus for moving table on stage | Tatsuo Harada, Masaaki Ito | 1982-11-09 |
| 4282469 | Positioning control system | — | 1981-08-04 |
| 4219933 | Diffraction grating ruling engine | Toshiaki Kita, Tatsuo Harada | 1980-09-02 |