Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12072507 | Laser radiation system | Osamu Wakabayashi, Hiroshi Ikenoue | 2024-08-27 |
| 11710660 | Laser irradiation method and laser irradiation system | Hiroshi Ikenoue, Osamu Wakabayashi, Akira SUWA | 2023-07-25 |
| 9291919 | Light exposure method, and light exposure apparatus | — | 2016-03-22 |
| 6613497 | Light exposure method | Nobuyuki Matsuzawa | 2003-09-02 |
| 5485497 | Optical element and projection exposure apparatus employing the same | Masaaki Ito, Takashi Soga, Taro Ogawa, Kozo Mochiji, Eiji Takeda | 1996-01-16 |
| 5372916 | X-ray exposure method with an X-ray mask comprising phase shifter sidewalls | Taro Ogawa, Kozo Mochiji, Seiichi Murayama, Takashi Soga, Seiji Yamamoto +1 more | 1994-12-13 |
| 5305364 | Projection type X-ray lithography apparatus | Kozo Mochiji, Shigeo Moriyama, Shinji Okazaki, Tsuneo Terasawa, Masaaki Itou | 1994-04-19 |
| 5272744 | Reflection mask | Masaaki Itou, Shigeo Moriyama | 1993-12-21 |
| 5177773 | X-ray mask and method for producing same | Kozo Mochiji, Shimpei Iijima | 1993-01-05 |
| 5017458 | Method for production of graft copolymer, pattern replication method, and base polymer and resist for graft copolymerization | Yasunari Soda, Kozo Mochiji, Takeshi Kimura | 1991-05-21 |
| 4960676 | Method for forming pattern by using graft copolymerization | Kozo Mochiji, Yasunari Soda, Takeshi Kimura | 1990-10-02 |
| 4954424 | Pattern fabrication by radiation-induced graft copolymerization | Kozo Mochiji, Yasunari Soda, Taro Ogawa, Takeshi Kimura | 1990-09-04 |