Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7558683 | Method for inspecting defect and system therefor | Takanori Ninomiya, Seiji Isogai, Shigeru Matsui | 2009-07-07 |
| 7356177 | Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus | Kenji Obara, Yuji Takagi, Ryo Nakagaki, Yasuhiko Ozawa, Seiji Isogai | 2008-04-08 |
| 7305314 | Method for inspecting defect and system therefor | Takanori Ninomiya, Seiji Isogai, Shigeru Matsui | 2007-12-04 |
| 7113628 | Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus | Kenji Obara, Yuji Takagi, Ryo Nakagaki, Yasuhiro Ozawa, Seiji Isogai | 2006-09-26 |
| 7010447 | Method for inspecting defect and system therefor | Takanori Ninomiya, Seiji Isogai, Shigeru Matsui | 2006-03-07 |
| 6792359 | Method for inspecting defect and system therefor | Takanori Ninomiya, Seiji Isogai, Shigeru Matsui | 2004-09-14 |
| 6765205 | Electron microscope including apparatus for X-ray analysis and method of analyzing specimens using same | Isao Ochiai, Toshiro Kubo, Naomasa Suzuki | 2004-07-20 |
| 6553323 | Method and its apparatus for inspecting a specimen | Kenji Obara, Yuji Takagi, Toshifumi Honda, Ryo Nakagaki, Yasuhiko Ozawa | 2003-04-22 |
| 6476388 | Scanning electron microscope having magnification switching control | Ryo Nakagaki, Yuji Takagi, Atsushi Shimoda, Kenji Obara, Yasuhiko Ozawa +4 more | 2002-11-05 |
| RE36731 | Method of forming pattern and projection aligner for carrying out the same | Hiroshi Fukuda, Norio Hasegawa, Toshihiko Tanaka | 2000-06-13 |
| 5747816 | Charged particle beam apparatus | — | 1998-05-05 |
| 5392115 | Method of detecting inclination of a specimen and a projection exposure device as well as method of detecting period of periodically varying signal | Yoshitada Oshida, Taku Ninomiya | 1995-02-21 |
| 5247329 | Projection type exposure method and apparatus | Yoshitada Oshida, Akira Inagaki, Yoshihiko Aiba | 1993-09-21 |
| 5235400 | Method of and apparatus for detecting defect on photomask | Tsuneo Terasawa, Norio Hasegawa, Toshihiko Tanaka, Hiroshi Fukuda | 1993-08-10 |
| 5078495 | Monochromator | Tatsuo Harada, Tsuneo Terasawa, Toshiaki Kita | 1992-01-07 |
| 4992825 | Method of forming pattern and projection aligner for carrying out the same | Hiroshi Fukuda, Norio Hasegawa, Toshihiko Tanaka | 1991-02-12 |
| 4983039 | Spectrometer | Tatsuo Harada, Toshiaki Kita, Tsuneo Terasawa | 1991-01-08 |
| 4904569 | Method of forming pattern and projection aligner for carrying out the same | Hiroshi Fukuda, Norio Hasegawa, Toshihiko Tanaka, Saburo Nonogaki, Yoshio Taniguchi +1 more | 1990-02-27 |
| 4869999 | Method of forming pattern and projection aligner for carrying out the same | Hiroshi Fukuda, Norio Hasegawa, Toshihiko Tanaka | 1989-09-26 |
| 4857744 | Optical projection printing apparatus wherein wafer mark has a grating pitch in the sagittal plane of the first optical system | Keiji Kataoka, Seiji Yonezawa, Soichi Katagiri | 1989-08-15 |
| 4798470 | Pattern printing method and apparatus | Shigeo Moriyama, Tsuneo Terasawa, Shinji Okazaki, Yoshio Kawamura | 1989-01-17 |
| 4614432 | Pattern detector | Shinji Kuniyoshi, Tsuneo Terasawa, Yoshio Kawamura, Sumio Hosaka, Akihiro Takanashi | 1986-09-30 |
| 4597669 | Pattern detector | Tsuneo Terasawa, Shinji Kuniyoshi, Akihiro Takanashi, Yoshio Kawamura, Sumio Hosaka | 1986-07-01 |
| 4504726 | Pattern generator | Sumio Hosaka, Akihiro Takanashi, Shinji Kuniyoshi, Yoshio Kawamura, Tsuneo Terasawa | 1985-03-12 |
| 4480910 | Pattern forming apparatus | Akihiro Takanashi, Tatsuo Harada, Masamoto Akeyama, Yataro Kondo, Shinji Kuniyoshi +2 more | 1984-11-06 |