Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692693 | System and method for measuring patterns | Wei Sun, Yasunari Sohda, Yasunori Goto | 2020-06-23 |
| 9858659 | Pattern inspecting and measuring device and program | Tsuyoshi Minakawa, Takashi Hiroi, Takeyuki Yoshida, Takuma Yamamoto, Hiroyuki Shindo +3 more | 2018-01-02 |
| 9188554 | Pattern inspection device and pattern inspection method | Chie Shishido, Shinya Murakami, Takashi Hiroi, Michio Nakano | 2015-11-17 |
| 8953868 | Defect inspection method and defect inspection apparatus | Shinya Murakami, Chie Shishido, Takashi Hiroi, Tsuyoshi Minakawa, Atsushi Miyamoto | 2015-02-10 |
| 8907278 | Charged particle beam applied apparatus, and irradiation method | Momoyo Enyama, Hiroya Ota, Mari Nozoe | 2014-12-09 |
| 8552373 | Charged particle beam device and sample observation method | Momoyo Enyama, Hiroya Ohta, Mari Nozoe | 2013-10-08 |
| 7855363 | Inspection method and apparatus using an electron beam | Hiroshi Miyai, Ryuichi Funatsu, Yasuhiko Nara | 2010-12-21 |
| 7425704 | Inspection method and apparatus using an electron beam | Hiroshi Miyai, Ryuichi Funatsu, Yasuhiko Nara | 2008-09-16 |
| 7397031 | Method of inspecting a circuit pattern and inspecting instrument | Hiroyuki Shinada, Atsuko Takafuji, Takanori Ninomiya, Yuko Sasaki, Mari Nozoe +5 more | 2008-07-08 |
| 7271385 | Inspection method and inspection apparatus using electron beam | Yasuhiro Gunji, Ryuichi Funatsu, Yoshikazu Inada, Kenjirou Yamamoto, Mari Nozoe | 2007-09-18 |
| 7098455 | Method of inspecting a circuit pattern and inspecting instrument | Hiroyuki Shinada, Atsuko Takafuji, Takanori Ninomiya, Yuko Sasaki, Mari Nozoe +5 more | 2006-08-29 |
| 7071468 | Circuit pattern inspection method and its apparatus | Hiroshi Miyai, Ryuichi Funatsu, Yasuhiko Nara | 2006-07-04 |
| 7034298 | Inspection method and apparatus using an electron beam | Hiroshi Miyai, Ryuichi Funatsu, Yasuhiko Nara | 2006-04-25 |
| 6885012 | Convergent charged particle beam apparatus and inspection method using same | Maki Tanaka, Masahiro Watanabe, Takashi Hiroi, Hiroyuki Shinada | 2005-04-26 |
| 6744057 | Convergent charged particle beam apparatus and inspection method using same | Maki Tanaka, Masahiro Watanabe, Takashi Hiroi, Hiroyuki Shinada | 2004-06-01 |
| 6583413 | Method of inspecting a circuit pattern and inspecting instrument | Hiroyuki Shinada, Atsuko Takafuji, Takanori Ninomiya, Yuko Sasaki, Mari Nozoe +5 more | 2003-06-24 |
| 6580075 | Charged particle beam scanning type automatic inspecting apparatus | Masatsugu Kametani, Kenjiro Yamamoto, Osamu Yamada, Katsuhisa Ike | 2003-06-17 |
| 6559459 | Convergent charged particle beam apparatus and inspection method using same | Maki Tanaka, Masahiro Watanabe, Takashi Hiroi, Hiroyuki Shinada | 2003-05-06 |
| 6538248 | Charged particle beam scanning type automatic inspecting apparatus | Masatsugu Kametani, Kenjiro Yamamoto, Osamu Yamada, Katsuhisa Ike | 2003-03-25 |
| 6486472 | Inspecting system using electron beam and inspecting method using same | Yasuhiro Gunji, Masatsugu Kametani, Masahiro Koyama, Kenjiro Yamamoto | 2002-11-26 |
| 6465781 | Method and apparatus for inspecting or measuring a sample based on charged-particle beam imaging, and a charged-particle beam apparatus | Norimasa Nishimura, Akira Shimase, Masahiro Watanabe, Asahiro Kuni, Hiroshi Miyai | 2002-10-15 |
| 6335532 | Convergent charged particle beam apparatus and inspection method using same | Maki Tanaka, Masahiro Watanabe, Takashi Hiroi, Hiroyuki Shinada | 2002-01-01 |
| 6310341 | Projecting type charged particle microscope and projecting type substrate inspection system | Hideo Todokoro, Tohru Ishitani, Yasutsugu Usami, Shunroku Taya, Hiroyuki Shinada +1 more | 2001-10-30 |
| 5392115 | Method of detecting inclination of a specimen and a projection exposure device as well as method of detecting period of periodically varying signal | Yoshitada Oshida, Toshiei Kurosaki | 1995-02-21 |