Issued Patents All Time
Showing 25 most recent of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10186399 | Scanning electron microscope | Mayuka Osaki, Maki Tanaka, Hitoshi Namai, Fumihiro Sasajima, Makoto Suzuki +1 more | 2019-01-22 |
| 9852881 | Scanning electron microscope system, pattern measurement method using same, and scanning electron microscope | Takuma Yamamoto, Shinya Yamada, Maki Tanaka | 2017-12-26 |
| 9671223 | Pattern dimension measurement method using electron microscope, pattern dimension measurement system, and method for monitoring changes in electron microscope equipment over time | Maki Tanaka, Katsuhiro Sasada | 2017-06-06 |
| 9488815 | Pattern evaluation method and pattern evaluation device | Atsushi Miyamoto, Mayuka Osaki, Maki Kimura | 2016-11-08 |
| 9354049 | Shape measurement method, and system therefor | Maki Tanaka, Atsushi Miyamoto, Akira Hamamatsu, Manabu Yano | 2016-05-31 |
| 9188554 | Pattern inspection device and pattern inspection method | Shinya Murakami, Takashi Hiroi, Taku Ninomiya, Michio Nakano | 2015-11-17 |
| 9019362 | Charged particle beam device and a method of improving image quality of the same | Jie Bai, Kenji Nakahira, Atsushi Miyamoto, Hideyuki Kazumi | 2015-04-28 |
| 8953868 | Defect inspection method and defect inspection apparatus | Shinya Murakami, Takashi Hiroi, Taku Ninomiya, Tsuyoshi Minakawa, Atsushi Miyamoto | 2015-02-10 |
| 8671366 | Estimating shape based on comparison between actual waveform and library in lithography process | Maki Tanaka, Norio Hasegawa, Mayuka Osaki | 2014-03-11 |
| 8502144 | Tool-to-tool matching control method and its system for scanning electron microscope | Mayuka Oosaki, Hiroki Kawada, Tatsuya Maeda | 2013-08-06 |
| 8502145 | Electron microscope system and method for evaluating film thickness reduction of resist patterns | Mayuka Iwasaki, Maki Tanaka | 2013-08-06 |
| 8481936 | Scanning electron microscope system and method for measuring dimensions of patterns formed on semiconductor device by using the system | Maki Tanaka, Atsushi Miyamoto | 2013-07-09 |
| 8357897 | Charged particle beam device | Atsushi Miyamoto, Mayuka Iwasaki, Tomofumi Nishiura, Go Kotaki | 2013-01-22 |
| 8331651 | Method and apparatus for inspecting defect of pattern formed on semiconductor device | Tomofumi Nishiura, Atsushi Miyamoto, Takumichi Sutani | 2012-12-11 |
| 8217348 | Electron microscope system and method for evaluating film thickness reduction of resist patterns | Mayuka Iwasaki, Maki Tanaka | 2012-07-10 |
| 8207512 | Charged particle beam apparatus and methods for capturing images using the same | Mayuka Oosaki, Mitsugu Sato, Hiroki Kawada, Tatsuya Maeda | 2012-06-26 |
| 8110800 | Scanning electron microscope system and method for measuring dimensions of patterns formed on semiconductor device by using the system | Maki Tanaka, Atsushi Miyamoto | 2012-02-07 |
| 8107717 | Defect inspection method and apparatus | Shunji Maeda, Kenji Oka, Yukihiro Shibata, Minoru Yoshida, Yuji Takagi +2 more | 2012-01-31 |
| 8095896 | Method and system of displaying an exposure condition | Hirohito Koike, Hidetoshi Morokuma | 2012-01-10 |
| 8045789 | Method and apparatus for inspecting defect of pattern formed on semiconductor device | Tomofumi Nishiura, Atsushi Miyamoto, Takumichi Sutani | 2011-10-25 |
| 8022356 | Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope | Mayuka Oosaki, Maki Tanaka, Hiroki Kawada | 2011-09-20 |
| 8003940 | Tool-to-tool matching control method and its system for scanning electron microscope | Mayuka Oosaki, Hiroki Kawada, Tatsuya Maeda | 2011-08-23 |
| 7957579 | Pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Aritoshi Sugimoto, Maki Tanaka, Hiroshi Miyai +2 more | 2011-06-07 |
| 7916929 | Defect inspection method and apparatus | Shunji Maeda, Kenji Oka, Yukihiro Shibata, Minoru Yoshida, Yuji Takagi +2 more | 2011-03-29 |
| 7894658 | Pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Aritoshi Sugimoto, Maki Tanaka, Hiroshi Miyai +2 more | 2011-02-22 |