Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10393509 | Pattern height measurement device and charged particle beam device | Hiroki Kawada, Takenori Hirose, Shou Takami | 2019-08-27 |
| 10184790 | Pattern measurement method and pattern measurement device | Hiroki Kawada, Hideo Sakai | 2019-01-22 |
| 9671223 | Pattern dimension measurement method using electron microscope, pattern dimension measurement system, and method for monitoring changes in electron microscope equipment over time | Chie Shishido, Maki Tanaka | 2017-06-06 |
| 8362426 | Scanning electron microscope and image signal processing method | Atsushi Kobaru, Hiroki Kawada | 2013-01-29 |
| 8203504 | Image forming method and charged particle beam apparatus | Atsushi Kobaru, Hidetoshi Morokuma, Hiroki Kawada, Sho Takami, Kouichi Yamamoto +2 more | 2012-06-19 |
| 8188427 | Scanning electron microscope alignment method and scanning electron microscope | Junichi Kakuta, Kazuhiro Ueda, Tatsuya Maeda, Hiroyuki Saito | 2012-05-29 |
| 8178836 | Electrostatic charge measurement method, focus adjustment method, and scanning electron microscope | Tatsuaki Ishijima, Ritsuo Fukaya | 2012-05-15 |
| 8071961 | Charged particle beam apparatus | Hiroaki Mito, Kazuo Kato, Tomohiro Kudo, Tomonori Saeki | 2011-12-06 |
| 7817105 | Image forming method and charged particle beam apparatus | Atsushi Kobaru, Hidetoshi Morokuma, Hiroki Kawada, Sho Takami, Kouichi Yamamoto +2 more | 2010-10-19 |
| 7745782 | Electrostatic charge measurement method, focus adjustment method, and scanning electron microscope | Tatsuaki Ishijima, Ritsuo Fukaya | 2010-06-29 |
| 7626166 | Electron microscope | Hiroyuki Saito | 2009-12-01 |
| 7601974 | Charged particle beam apparatus | Hiroaki Mito, Kazuo Kato, Tomohiro Kudo, Tomonori Saeki, Yasuo Yahagi +1 more | 2009-10-13 |
| 7566892 | Electron beam apparatus and method for production of its specimen chamber | Tsuyoshi Inanobe, Sho Takami, Yoichi Ose | 2009-07-28 |
| 7514683 | Scanning electron microscope | Kazuma Tanii, Yuji Kasai, Eiichi Seya | 2009-04-07 |
| 7435958 | Electron beam apparatus and method for production of its specimen chamber | Tsuyoshi Inanobe, Sho Takami, Yoichi Ose | 2008-10-14 |
| 7247864 | Charged particle beam apparatus | Hiroaki Mito, Kazuo Kato, Tomohiro Kudo, Tomonori Saeki | 2007-07-24 |
| 7205541 | Charged particle beam apparatus | Hiroaki Mito, Kazuo Kato, Tomohiro Kudo, Tomonori Saeki, Yasuo Yahagi +1 more | 2007-04-17 |
| 7205550 | Electron beam apparatus and method for production of its specimen chamber | Tsuyoshi Inanobe, Sho Takami, Yoichi Ose | 2007-04-17 |
| 7187345 | Image forming method and charged particle beam apparatus | Atsushi Kobaru, Hidetoshi Morokuma, Hiroki Kawada, Sho Takami, Kouichi Yamamoto +2 more | 2007-03-06 |
| 7053371 | Scanning electron microscope with measurement function | Yuuki Ojima, Kazuhiro Ueda, Tsuyoshi Morimoto | 2006-05-30 |
| 7030376 | Electron beam apparatus and method for production of its specimen chamber | Tsuyoshi Inanobe, Sho Takami, Yoichi Ose | 2006-04-18 |
| 5867592 | Method of utilizing edge images of a circular surface for detecting the position, posture, and shape of a three-dimensional objective having the circular surface part | Tomoharu Nakahara, Hidekazu Araki | 1999-02-02 |
| 5692061 | Method of utilizing a two-dimensional image for detecting the position, posture, and shape of a three-dimensional objective | Tomoharu Nakahara, Hidekazu Araki | 1997-11-25 |
| 5614713 | Scanning electron microscope | Atsushi Kobaru, Tadashi Otaka, Tatsuya Maeda | 1997-03-25 |
| 5598002 | Electron beam apparatus | Hideo Todokoro, Tadashi Otaka, Tatsuya Maeda | 1997-01-28 |