Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8686380 | Charged particle beam apparatus | Souichi Katagiri, Takashi Ohshima, Makoto Ezumi, Takashi Doi, Yuji Kasai | 2014-04-01 |
| 8203504 | Image forming method and charged particle beam apparatus | Atsushi Kobaru, Hidetoshi Morokuma, Hiroki Kawada, Katsuhiro Sasada, Kouichi Yamamoto +2 more | 2012-06-19 |
| 7817105 | Image forming method and charged particle beam apparatus | Atsushi Kobaru, Hidetoshi Morokuma, Hiroki Kawada, Katsuhiro Sasada, Kouichi Yamamoto +2 more | 2010-10-19 |
| 7795581 | Pattern measuring method and electron microscope | Shuichi Nakagawa | 2010-09-14 |
| 7566892 | Electron beam apparatus and method for production of its specimen chamber | Tsuyoshi Inanobe, Yoichi Ose, Katsuhiro Sasada | 2009-07-28 |
| 7435958 | Electron beam apparatus and method for production of its specimen chamber | Tsuyoshi Inanobe, Yoichi Ose, Katsuhiro Sasada | 2008-10-14 |
| 7205550 | Electron beam apparatus and method for production of its specimen chamber | Tsuyoshi Inanobe, Yoichi Ose, Katsuhiro Sasada | 2007-04-17 |
| 7187345 | Image forming method and charged particle beam apparatus | Atsushi Kobaru, Hidetoshi Morokuma, Hiroki Kawada, Katsuhiro Sasada, Kouichi Yamamoto +2 more | 2007-03-06 |
| 7091496 | Electron microscopic inspection apparatus | Tadashi Otaka, Manabu Shirakihara | 2006-08-15 |
| 7030376 | Electron beam apparatus and method for production of its specimen chamber | Tsuyoshi Inanobe, Yoichi Ose, Katsuhiro Sasada | 2006-04-18 |
| 6512228 | Scanning electron microscope | Hideo Todokoro, Makoto Ezumi | 2003-01-28 |
| 6444981 | Scanning electron microscope | Hideo Todokoro, Makoto Ezumi | 2002-09-03 |
| 5912462 | Electron microscope | Tadashi Otaka | 1999-06-15 |