Issued Patents All Time
Showing 1–25 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8334520 | Charged particle beam apparatus | Hiroyuki Ito, Ryoichi Ishii, Manabu Yano, Hajime Kawano | 2012-12-18 |
| 8324594 | Charged particle beam apparatus | Hiroyuki Ito, Yuko Sasaki | 2012-12-04 |
| 8080789 | Sample dimension measuring method and scanning electron microscope | Osamu Nasu, Hiroki Kawada, Ritsuo Fukaya, Makoto Ezumi | 2011-12-20 |
| 7910886 | Sample dimension measuring method and scanning electron microscope | Hiroki Kawada, Takashi Iizumi | 2011-03-22 |
| 7838827 | Monochromator and scanning electron microscope using the same | Yoichi Ose, Shunroku Taya, Hideo Todokoro, Mitsugu Sato, Makoto Ezumi | 2010-11-23 |
| 7805023 | Image evaluation method and microscope | Tohru Ishitani, Mitsugu Sato, Hideo Todokoro, Takashi Iizumi, Atsushi Takane | 2010-09-28 |
| 7800059 | Method of forming a sample image and charged particle beam apparatus | Mitsugu Sato, Atsushi Takane, Takashi Iizumi, Hideo Todokoro, Satoru Yamaguchi +1 more | 2010-09-21 |
| 7659508 | Method for measuring dimensions of sample and scanning electron microscope | Osamu Nasu, Hiroki Kawada, Ritsuo Fukaya, Makoto Ezumi | 2010-02-09 |
| 7605381 | Charged particle beam alignment method and charged particle beam apparatus | Mitsugu Sato, Makoto Ezumi, Atsushi Takane, Shoji Yoshida, Satoru Yamaguchi +1 more | 2009-10-20 |
| 7476856 | Sample dimension-measuring method and charged particle beam apparatus | Kenji Watanabe, Ryo Nakagaki, Chie Shishido, Masakazu Takahashi, Yuya Toyoshima | 2009-01-13 |
| 7385196 | Method and scanning electron microscope for measuring width of material on sample | Goroku Shimoma, Mitsugu Sato, Hideo Todokoro, Shunichi Watanabe, Tadanori Takahashi +3 more | 2008-06-10 |
| 7369703 | Method and apparatus for circuit pattern inspection | Atsuko Yamaguchi, Tsuneo Terasawa, Takashi Iizumi, Osamu Komuro | 2008-05-06 |
| 7361894 | Method of forming a sample image and charged particle beam apparatus | Mitsugu Sato, Atsushi Takane, Takashi Iizumi, Hideo Todokoro, Satoru Yamaguchi +1 more | 2008-04-22 |
| 7340111 | Image evaluation method and microscope | Tohru Ishitani, Mitsugu Sato, Hideo Todokoro, Takashi Iizumi, Atsushi Takane | 2008-03-04 |
| 7315024 | Monochromator and scanning electron microscope using the same | Yoichi Ose, Shunroku Taya, Hideo Todokoro, Mitsugu Sato, Makoto Ezumi | 2008-01-01 |
| 7285777 | Sample dimension measuring method and scanning electron microscope | Hiroki Kawada, Takashi Iizumi | 2007-10-23 |
| 7236651 | Image evaluation method and microscope | Tohru Ishitani, Mitsugu Sato, Hideo Todokoro, Takashi Iizumi, Atsushi Takane | 2007-06-26 |
| 7164126 | Method of forming a sample image and charged particle beam apparatus | Mitsugu Sato, Atsushi Takane, Takashi Iizumi, Hideo Todokoro, Satoru Yamaguchi +1 more | 2007-01-16 |
| 7130063 | Micropattern shape measuring system and method | Yasuhiro Mitsui, Yasutsugu Usami, Isao Kawata, Yuya Toyoshima, Nobuyuki Iriki | 2006-10-31 |
| 7095884 | Method and apparatus for circuit pattern inspection | Atsuko Yamaguchi, Tsuneo Terasawa, Takashi Iizumi, Osamu Komuro | 2006-08-22 |
| 7091496 | Electron microscopic inspection apparatus | Sho Takami, Manabu Shirakihara | 2006-08-15 |
| 7038767 | Three-dimensional micropattern profile measuring system and method | Yuya Toyoshima, Yasuhiro Mitsui, Yasutsugu Usami, Isao Kawata | 2006-05-02 |
| 7034296 | Method of forming a sample image and charged particle beam apparatus | Mitsugu Sato, Atsushi Takane, Takashi Iizumi, Hideo Todokoro, Satoru Yamaguchi +1 more | 2006-04-25 |
| 7022983 | Monochromator and scanning electron microscope using the same | Yoichi Ose, Shunroku Taya, Hideo Todokoro, Mitsugu Sato, Makoto Ezumi | 2006-04-04 |
| 6933500 | Electron microscope | Kazutoshi Kaji, Shohei Terada | 2005-08-23 |