Issued Patents All Time
Showing 1–25 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8558999 | Defect inspection apparatus and method utilizing multiple inspection conditions | Koji Kawaki, Hiroshi Kikuchi, Nobuhiro Obara, Yuji Inoue | 2013-10-15 |
| 8335397 | Charged particle beam apparatus | Mitsuji Ikeda, Atsushi Kobaru | 2012-12-18 |
| 8304722 | Charged particle beam equipment and charged particle microscopy | Hiromi Inada, Mitsugu Sato | 2012-11-06 |
| 8263935 | Charged particle beam apparatus | Mitsuji Ikeda, Satoru Yamaguchi, Yasuhiko Ozawa | 2012-09-11 |
| 8041104 | Pattern matching apparatus and scanning electron microscope using the same | Yasutaka Toyoda, Mitsuji Ikeda | 2011-10-18 |
| 8030614 | Charged particle beam apparatus and dimension measuring method | Mitsugu Sato, Katsuhiko Sakai, Yoshihiko Nakayama | 2011-10-04 |
| 8026491 | Charged particle beam apparatus and method for charged particle beam adjustment | Takeshi Ogashiwa, Mitsugu Sato, Toshihide Agemura, Yuusuke Narita, Takeharu Shichiji +3 more | 2011-09-27 |
| 7973282 | Charged particle beam apparatus and dimension measuring method | Mitsugu Sato, Katsuhiko Sakai, Yoshihiko Nakayama | 2011-07-05 |
| 7923701 | Charged particle beam equipment | Hiromi Inada, Hiroyuki Tanaka, Shun-ichi Watanabe, Shigeto Isakozawa, Mitsugu Sato +1 more | 2011-04-12 |
| 7805023 | Image evaluation method and microscope | Tohru Ishitani, Mitsugu Sato, Hideo Todokoro, Tadashi Otaka, Takashi Iizumi | 2010-09-28 |
| 7800059 | Method of forming a sample image and charged particle beam apparatus | Mitsugu Sato, Takashi Iizumi, Tadashi Otaka, Hideo Todokoro, Satoru Yamaguchi +1 more | 2010-09-21 |
| 7652249 | Charged particle beam apparatus | Mitsuji Ikeda, Satoru Yamaguchi, Yasuhiko Ozawa | 2010-01-26 |
| 7642514 | Charged particle beam apparatus | Haruo Yoda, Hideo Todokoro, Fumio Mizuno, Shoji Yoshida, Mitsuji Ikeda +2 more | 2010-01-05 |
| 7633063 | Charged particle beam apparatus | Satoru Yamaguchi, Mitsugu Sato | 2009-12-15 |
| 7605381 | Charged particle beam alignment method and charged particle beam apparatus | Mitsugu Sato, Tadashi Otaka, Makoto Ezumi, Shoji Yoshida, Satoru Yamaguchi +1 more | 2009-10-20 |
| 7459683 | Charged particle beam device with DF-STEM image valuation method | Mine Araki, Shunya Watanabe, Chisato Kamiya, Mitsugu Sato, Akinari Morikawa +2 more | 2008-12-02 |
| 7435957 | Charged particle beam equipment and charged particle microscopy | Hiromi Inada, Mitsugu Sato | 2008-10-14 |
| 7433542 | Method for measuring line and space pattern using scanning electron microscope | Tatsuya Maeda, Takashi Iizumi | 2008-10-07 |
| 7375330 | Charged particle beam equipment | Hiromi Inada, Hiroyuki Tanaka, Shun-ichi Watanabe, Shigeto Isakozawa, Mitsugu Sato +1 more | 2008-05-20 |
| 7372047 | Charged particle system and a method for measuring image magnification | Mitsugu Sato, Shigeto Isakozawa, Takashi Iizumi, Tatsuya Maeda, Hiromi Inada | 2008-05-13 |
| 7361894 | Method of forming a sample image and charged particle beam apparatus | Mitsugu Sato, Takashi Iizumi, Tadashi Otaka, Hideo Todokoro, Satoru Yamaguchi +1 more | 2008-04-22 |
| 7340111 | Image evaluation method and microscope | Tohru Ishitani, Mitsugu Sato, Hideo Todokoro, Tadashi Otaka, Takashi Iizumi | 2008-03-04 |
| 7329868 | Charged particle beam apparatus | Haruo Yoda, Hideo Todokoro, Fumio Mizuno, Shoji Yoshida, Mitsuji Ikeda +2 more | 2008-02-12 |
| 7236651 | Image evaluation method and microscope | Tohru Ishitani, Mitsugu Sato, Hideo Todokoro, Tadashi Otaka, Takashi Iizumi | 2007-06-26 |
| 7235782 | Semiconductor inspection system | Haruo Yoda, Shoji Yoshida, Mitsuji Ikeda, Yasuhiko Ozawa | 2007-06-26 |