Issued Patents All Time
Showing 1–25 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9230775 | Charged particle instrument | Takeyoshi Ohashi, Yasunari Sohda, Muneyuki Fukuda, Noritsugu Takahashi | 2016-01-05 |
| 8835844 | Sample electrification measurement method and charged particle beam apparatus | Yoichi Ose, Akira Ikegami, Hideo Todokoro, Tatsuaki Ishijima, Takahiro Sato +2 more | 2014-09-16 |
| 8698080 | Scanning electron microscope | Noriaki Arai, Yoichi Ose | 2014-04-15 |
| 8686380 | Charged particle beam apparatus | Souichi Katagiri, Takashi Ohshima, Sho Takami, Takashi Doi, Yuji Kasai | 2014-04-01 |
| 8481934 | Method for inspecting and measuring sample and scanning electron microscope | Satoru Iwama, Junichi Kakuta, Takahiro Sato, Akira Ikegami | 2013-07-09 |
| 8338781 | Charged particle beam scanning method and charged particle beam apparatus | Yuko Sasaki, Makoto Nishihara, Tsutomu Kawai, Toshiaki Yanokura | 2012-12-25 |
| 8080789 | Sample dimension measuring method and scanning electron microscope | Osamu Nasu, Tadashi Otaka, Hiroki Kawada, Ritsuo Fukaya | 2011-12-20 |
| 8067733 | Scanning electron microscope having a monochromator | Wataru MORI, Yoichi Ose | 2011-11-29 |
| 7977632 | Scanning electron microscope | Hideo Todokoro, Yasutsugu Usami | 2011-07-12 |
| 7960696 | Method for inspecting and measuring sample and scanning electron microscope | Satoru Iwama, Junichi Kakuta, Takahiro Sato, Akira Ikegami | 2011-06-14 |
| 7935925 | Charged particle beam scanning method and charged particle beam apparatus | Yuko Sasaki, Makoto Nishihara, Tsutomu Kawai, Toshiaki Yanokura | 2011-05-03 |
| 7838827 | Monochromator and scanning electron microscope using the same | Yoichi Ose, Shunroku Taya, Hideo Todokoro, Tadashi Otaka, Mitsugu Sato | 2010-11-23 |
| 7718976 | Charged particle beam apparatus | Takeshi Kawasaki, Mitsugu Sato, Tomonori Nakano | 2010-05-18 |
| 7714286 | Charged particle beam apparatus, aberration correction value calculation unit therefor, and aberration correction program therefor | Tomonori Nakano, Takeshi Kawasaki, Kotoko Hirose | 2010-05-11 |
| 7700918 | Sample electrification measurement method and charged particle beam apparatus | Yoichi Ose, Akira Ikegami, Hideo Todokoro, Tatsuaki Ishijima, Takahiro Sato +2 more | 2010-04-20 |
| 7659508 | Method for measuring dimensions of sample and scanning electron microscope | Osamu Nasu, Tadashi Otaka, Hiroki Kawada, Ritsuo Fukaya | 2010-02-09 |
| 7642514 | Charged particle beam apparatus | Atsushi Takane, Haruo Yoda, Hideo Todokoro, Fumio Mizuno, Shoji Yoshida +2 more | 2010-01-05 |
| 7612336 | Scanning electron microscope having a monochromator | Wataru MORI, Yoichi Ose | 2009-11-03 |
| 7605381 | Charged particle beam alignment method and charged particle beam apparatus | Mitsugu Sato, Tadashi Otaka, Atsushi Takane, Shoji Yoshida, Satoru Yamaguchi +1 more | 2009-10-20 |
| 7566872 | Scanning electron microscope | Ritsuo Fukaya, Hidetoshi Sato, Zhigang Wang, Noriaki Arai | 2009-07-28 |
| 7459681 | Scanning electron microscope | Noriaki Arai, Yoichi Ose | 2008-12-02 |
| 7442923 | Scanning electron microscope | Hideo Todokoro, Yasutsugu Usami | 2008-10-28 |
| 7408172 | Charged particle beam apparatus and charged particle beam irradiation method | Mitsugu Sato, Hideo Todokoro, Yoichi Ose, Noriaki Arai, Takashi Doi | 2008-08-05 |
| 7399966 | Scanning electron microscope | Hideo Todokoro, Yoichi Ose, Naomasa Suzuki | 2008-07-15 |
| 7372028 | Sample electrification measurement method and charged particle beam apparatus | Yoichi Ose, Akira Ikegami, Hideo Todokoro, Tatsuaki Ishijima, Takahiro Sato +2 more | 2008-05-13 |