Issued Patents All Time
Showing 1–25 of 129 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10241062 | Charged particle beam device, sample observation method, sample platform, observation system, and light emitting member | Yusuke Ominami, Kenko Uchida, Sadamitsu Aso, Taku Sakazume, Hideo Morishita +2 more | 2019-03-26 |
| 10176968 | Method for adjusting charged particle beam device and adjusting beam aperture based on a selected emission condition and charged particle beam device for same | Kunji Shigeto, Tsutomu Saito, Kohtaro Hosoya, Yoshihiro Takahoko, Tohru Ando | 2019-01-08 |
| 10020163 | Charged particle beam apparatus, specimen observation system and operation program | Yayoi Konishi, Masaki Takano, Shotaro Tamayama, Masako Nishimura, Shunya Watanabe +1 more | 2018-07-10 |
| 9792832 | Charged particle beam apparatus, specimen observation system and operation program | Yayoi Konishi, Hiroyuki Noda, Takahiro Inada, Kunji Shigeto, Tohru Ando +2 more | 2017-10-17 |
| 9443694 | Charged particle beam apparatus, specimen observation system and operation program | Yayoi Konishi, Masaki Takano, Shotaro Tamayama, Masako Nishimura, Shunya Watanabe +1 more | 2016-09-13 |
| 9208995 | Charged particle beam apparatus | Yusuke Ominami, Takashi Ohshima, Hiroyuki Ito, Sukehiro Ito | 2015-12-08 |
| 9202667 | Charged particle radiation device with bandpass detection | Michio Hatano, Tetsuya Sawahata, Yasuko Watanabe, Sukehiro Ito, Takashi Ohshima +1 more | 2015-12-01 |
| 9123501 | Device for correcting diffraction aberration of electron beam | Muneyuki Fukuda, Yoichi Ose, Hiroyuki Ito, Hiroshi Suzuki, Naomasa Suzuki | 2015-09-01 |
| 9058957 | Charged particle beam apparatus | Kunji Shigeto, Noriko Iizumi, Hiroyuki Noda, Masako Nishimura, Shunya Watanabe +3 more | 2015-06-16 |
| 9040911 | Scanning electron microscope | Takeshi Ogashiwa, Mitsuru Konno | 2015-05-26 |
| 8629395 | Charged particle beam apparatus | Hideo Morishita, Michio Hatano, Takashi Ohshima, Tetsuya Sawahata, Sukehiro Ito +1 more | 2014-01-14 |
| 8604430 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Yasutsugu Usami, Mikio Ichihashi +6 more | 2013-12-10 |
| 8431893 | Electron beam apparatus and electron beam inspection method | Muneyuki Fukuda, Tomoyasu Shojo, Atsuko Fukada, Naomasa Suzuki, Ichiro Tachibana | 2013-04-30 |
| 8304722 | Charged particle beam equipment and charged particle microscopy | Hiromi Inada, Atsushi Takane | 2012-11-06 |
| 8304723 | Defect inspection and charged particle beam apparatus | Toshihide Agemura | 2012-11-06 |
| 8299760 | Battery charger | — | 2012-10-30 |
| 8222601 | Scanning electron microscope and method of imaging an object by using the scanning electron microscope | Ichiro Tachibana, Naomasa Suzuki | 2012-07-17 |
| 8217363 | Scanning electron microscope | Michio Hatano, Takashi Ohshima | 2012-07-10 |
| 8207512 | Charged particle beam apparatus and methods for capturing images using the same | Chie Shishido, Mayuka Oosaki, Hiroki Kawada, Tatsuya Maeda | 2012-06-26 |
| 8207498 | Electron beam apparatus and electron beam inspection method | Muneyuki Fukuda, Tomoyasu Shojo, Atsuko Fukada, Naomasa Suzuki, Ichiro Tachibana | 2012-06-26 |
| 8153969 | Inspection method and inspection system using charged particle beam | Atsuko Fukada, Naomasa Suzuki, Hidetoshi Nishiyama, Muneyuki Fukuda, Noritsugu Takahashi | 2012-04-10 |
| 8153970 | Scanning electron microscope | Hirohiko Kitsuki, Kazuo Aoki | 2012-04-10 |
| 8134125 | Method and apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Yasutsugu Usami, Mikio Ichihashi +6 more | 2012-03-13 |
| 8030614 | Charged particle beam apparatus and dimension measuring method | Katsuhiko Sakai, Atsushi Takane, Yoshihiko Nakayama | 2011-10-04 |
| 8026491 | Charged particle beam apparatus and method for charged particle beam adjustment | Takeshi Ogashiwa, Atsushi Takane, Toshihide Agemura, Yuusuke Narita, Takeharu Shichiji +3 more | 2011-09-27 |