| 8604430 |
Method and an apparatus of an inspection system using an electron beam |
Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami, Mikio Ichihashi +6 more |
2013-12-10 |
| 8134125 |
Method and apparatus of an inspection system using an electron beam |
Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami, Mikio Ichihashi +6 more |
2012-03-13 |
| 7439506 |
Method and an apparatus of an inspection system using an electron beam |
Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami, Mikio Ichihashi +6 more |
2008-10-21 |
| 7232996 |
Method and an apparatus of an inspection system using an electron beam |
Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami, Mikio Ichihashi +6 more |
2007-06-19 |
| 7012252 |
Method and an apparatus of an inspection system using an electron beam |
Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami, Mikio Ichihashi +6 more |
2006-03-14 |
| 6987265 |
Method and an apparatus of an inspection system using an electron beam |
Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami, Mikio Ichihashi +6 more |
2006-01-17 |
| 6580074 |
Charged particle beam emitting device |
Mitsugu Sato |
2003-06-17 |
| 6541771 |
Scanning electron microscope |
Mitsugu Sato |
2003-04-01 |
| 6512227 |
Method and apparatus for inspecting patterns of a semiconductor device with an electron beam |
Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami, Mikio Ichihashi +6 more |
2003-01-28 |
| 6452178 |
Method and an apparatus of an inspection system using an electron beam |
Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami, Mikio Ichihashi +6 more |
2002-09-17 |
| 6348690 |
Method and an apparatus of an inspection system using an electron beam |
Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami, Mikio Ichihashi +6 more |
2002-02-19 |
| 6225628 |
Scanning electron microscope |
Mitsugu Sato |
2001-05-01 |
| 5894124 |
Scanning electron microscope and its analogous device |
Mitsugu Sato, Yoichi Ose |
1999-04-13 |
| 5668372 |
Scanning electron microscope and its analogous device |
Mitsugu Sato, Yoichi Ose |
1997-09-16 |