Issued Patents All Time
Showing 1–25 of 137 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10903037 | Charged particle beam device | Keigo Kasuya, Shuhei Ishikawa, Kenji Tanimoto, Hajime Kawano, Souichi Katagiri +2 more | 2021-01-26 |
| 8835844 | Sample electrification measurement method and charged particle beam apparatus | Makoto Ezumi, Yoichi Ose, Akira Ikegami, Tatsuaki Ishijima, Takahiro Sato +2 more | 2014-09-16 |
| 8772735 | Charged particle beam apparatus, and method of controlling the same | Keigo Kasuya, Takashi Ohshima, Souichi Katagiri, Shigeru Kokubo | 2014-07-08 |
| 8604430 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami, Mikio Ichihashi +6 more | 2013-12-10 |
| 8319193 | Charged particle beam apparatus, and method of controlling the same | Keigo Kasuya, Takashi Ohshima, Souichi Katagiri, Shigeru Kokubo | 2012-11-27 |
| 8134125 | Method and apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami, Mikio Ichihashi +6 more | 2012-03-13 |
| 7982188 | Apparatus and method for wafer pattern inspection | Hiroyuki Shinada, Hisaya Murakoshi, Hiroshi Makino, Yoshihiro Anan | 2011-07-19 |
| 7977632 | Scanning electron microscope | Makoto Ezumi, Yasutsugu Usami | 2011-07-12 |
| 7956324 | Charged particle beam apparatus for forming a specimen image | Noritsugu Takahashi, Muneyuki Fukuda, Mitsugu Sato | 2011-06-07 |
| 7838827 | Monochromator and scanning electron microscope using the same | Yoichi Ose, Shunroku Taya, Tadashi Otaka, Mitsugu Sato, Makoto Ezumi | 2010-11-23 |
| 7825377 | Electron beam apparatus with aberration corrector | Takeshi Kawasaki, Takaho Yoshida, Yoichi Ose | 2010-11-02 |
| 7805023 | Image evaluation method and microscope | Tohru Ishitani, Mitsugu Sato, Tadashi Otaka, Takashi Iizumi, Atsushi Takane | 2010-09-28 |
| 7800059 | Method of forming a sample image and charged particle beam apparatus | Mitsugu Sato, Atsushi Takane, Takashi Iizumi, Tadashi Otaka, Satoru Yamaguchi +1 more | 2010-09-21 |
| 7700918 | Sample electrification measurement method and charged particle beam apparatus | Makoto Ezumi, Yoichi Ose, Akira Ikegami, Tatsuaki Ishijima, Takahiro Sato +2 more | 2010-04-20 |
| 7683319 | Charge control apparatus and measurement apparatus equipped with the charge control apparatus | Hiroshi Makino, Zhaohui Cheng, Kenji Tanimoto | 2010-03-23 |
| 7642514 | Charged particle beam apparatus | Atsushi Takane, Haruo Yoda, Fumio Mizuno, Shoji Yoshida, Mitsuji Ikeda +2 more | 2010-01-05 |
| 7491933 | Electron beam apparatus | Mitsugu Sato | 2009-02-17 |
| 7442923 | Scanning electron microscope | Makoto Ezumi, Yasutsugu Usami | 2008-10-28 |
| 7439506 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami, Mikio Ichihashi +6 more | 2008-10-21 |
| 7411190 | Inspection system, inspection method, and process management method | Hiroshi Makino, Hisaya Murakoshi, Hiroyuki Shinada | 2008-08-12 |
| 7408172 | Charged particle beam apparatus and charged particle beam irradiation method | Mitsugu Sato, Yoichi Ose, Makoto Ezumi, Noriaki Arai, Takashi Doi | 2008-08-05 |
| 7399966 | Scanning electron microscope | Makoto Ezumi, Yoichi Ose, Naomasa Suzuki | 2008-07-15 |
| 7394066 | Electron microscope and electron beam inspection system | Hisaya Murakoshi, Masaki Hasegawa | 2008-07-01 |
| 7385196 | Method and scanning electron microscope for measuring width of material on sample | Goroku Shimoma, Tadashi Otaka, Mitsugu Sato, Shunichi Watanabe, Tadanori Takahashi +3 more | 2008-06-10 |
| 7375323 | Electron beam apparatus with aberration corrector | Takeshi Kawasaki, Takaho Yoshida, Yoichi Ose | 2008-05-20 |