Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10627354 | Substitution site measuring equipment and substitution site measuring method | Masanari Koguchi | 2020-04-21 |
| 9752997 | Charged-particle-beam analysis device and analysis method | Masanari Koguchi | 2017-09-05 |
| 9601308 | Spectroscopic element and charged particle beam device using the same | Masanari Koguchi | 2017-03-21 |
| 8481932 | Charged particle beam analyzer and analysis method | Masanari Koguchi | 2013-07-09 |
| 7982188 | Apparatus and method for wafer pattern inspection | Hiroyuki Shinada, Hisaya Murakoshi, Hideo Todokoro, Hiroshi Makino | 2011-07-19 |
| 7022986 | Apparatus and method for wafer pattern inspection | Hiroyuki Shinada, Hisaya Murakoshi, Hideo Todokoro, Hiroshi Makino | 2006-04-04 |