| 10627354 |
Substitution site measuring equipment and substitution site measuring method |
Yoshihiro Anan |
2020-04-21 |
| 10088450 |
Method for evaluating structural change during production process, and analysis program |
Takeshi Nakayama |
2018-10-02 |
| 9752997 |
Charged-particle-beam analysis device and analysis method |
Yoshihiro Anan |
2017-09-05 |
| 9601308 |
Spectroscopic element and charged particle beam device using the same |
Yoshihiro Anan |
2017-03-21 |
| 8481932 |
Charged particle beam analyzer and analysis method |
Yoshihiro Anan |
2013-07-09 |
| 8334519 |
Multi-part specimen holder with conductive patterns |
Shiano Ono, Ruriko Tsuneta |
2012-12-18 |
| 7633064 |
Electric charged particle beam microscopy and electric charged particle beam microscope |
Ruriko Tsuneta, Hiromi Inada |
2009-12-15 |
| 7518111 |
Magnetic electron microscope |
Takao Matsumoto |
2009-04-14 |
| 7417227 |
Scanning interference electron microscope |
Takao Matsumoto |
2008-08-26 |
| 7372029 |
Scanning transmission electron microscope and scanning transmission electron microscopy |
Ruriko Tsuneta, Takahito Hashimoto, Kuniyasu Nakamura |
2008-05-13 |
| 7372051 |
Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system |
Ruriko Tsuneta, Hiromi Inada, Takahito Hashimoto |
2008-05-13 |
| 7227144 |
Scanning transmission electron microscope and scanning transmission electron microscopy |
Ruriko Tsuneta, Takahito Hashimoto, Kuniyasu Nakamura |
2007-06-05 |
| 7141790 |
Defect inspection instrument and positron beam apparatus |
Ruriko Tsuneta |
2006-11-28 |
| 6888139 |
Electron microscope |
Ruriko Tsuneta, Isao Nagaoki, Hiroyuki Kobayashi |
2005-05-03 |
| 6838667 |
Method and apparatus for charged particle beam microscopy |
Ruriko Tsuneta, Mari Nozoe, Muneyuki Fukuda, Mitsugu Sato |
2005-01-04 |
| 6750451 |
Observation apparatus and observation method using an electron beam |
Kuniyasu Nakamura, Kaoru Umemura, Yoshifumi Taniguchi, Mikio Ichihashi |
2004-06-15 |
| 6570156 |
Autoadjusting electron microscope |
Ruriko Tsuneta, Isao Nagaoki, Hiroyuki Kobayashi |
2003-05-27 |
| 6051834 |
Electron microscope |
Hiroshi Kakibayashi, Yasuhiro Mitsui, Hideo Todokoro, Katsuhiro Kuroda, Kazutaka Tsuji +7 more |
2000-04-18 |
| 5932880 |
Scintillator device and image pickup apparatus using the same |
Hiroshi Kakibayashi, Tetsuya Ooshima, Kenji Sameshima, Tatsuo Makishima, Keiichi Kanehori +1 more |
1999-08-03 |
| 5866905 |
Electron microscope |
Hiroshi Kakibayashi, Yasuhiro Mitsui, Hideo Todokoro, Katsuhiro Kuroda, Kazutaka Tsuji +7 more |
1999-02-02 |
| 5717207 |
Transmission electron microscope with camera system |
Hiroshi Kakibayashi, Hiroyuki Tanaka, Shigeto Isakozawa, Keiichi Kanehori, Tatsuo Makishima +1 more |
1998-02-10 |
| 5552602 |
Electron microscope |
Hiroshi Kakibayashi, Yasuhiro Mitsui, Hideo Tadokoro, Katsuhiro Kuroda, Kazutaka Tsuji +3 more |
1996-09-03 |
| 5362972 |
Semiconductor device using whiskers |
Masamitsu Yazawa, Kenji Hiruma, Toshio Katsuyama, Nobutaka Futigami, Hidetoshi Matsumoto +3 more |
1994-11-08 |