Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9830524 | Method for estimating shape before shrink and CD-SEM apparatus | Tomoko Sekiguchi, Takeyoshi Ohashi, Junichi Tanaka, Zhaohui Cheng, Hiroki Kawada +1 more | 2017-11-28 |
| 8993961 | Electric charged particle beam microscope and electric charged particle beam microscopy | Hideki Kikuchi | 2015-03-31 |
| 8963102 | Charged particle beam microscope, sample holder for charged particle beam microscope, and charged particle beam microscopy | Hideki Kikuchi, Hideo Kashima | 2015-02-24 |
| 8442300 | Specified position identifying method and specified position measuring apparatus | Tohru Ando, Junzo Azuma | 2013-05-14 |
| 8334519 | Multi-part specimen holder with conductive patterns | Shiano Ono, Masanari Koguchi | 2012-12-18 |
| 7863564 | Electric charged particle beam microscope and microscopy | Hideki Kikuchi, Takafumi Yotsuji, Toshie Yaguchi | 2011-01-04 |
| 7633064 | Electric charged particle beam microscopy and electric charged particle beam microscope | Masanari Koguchi, Hiromi Inada | 2009-12-15 |
| 7372029 | Scanning transmission electron microscope and scanning transmission electron microscopy | Masanari Koguchi, Takahito Hashimoto, Kuniyasu Nakamura | 2008-05-13 |
| 7372051 | Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system | Hiromi Inada, Masanari Koguchi, Takahito Hashimoto | 2008-05-13 |
| 7227144 | Scanning transmission electron microscope and scanning transmission electron microscopy | Masanari Koguchi, Takahito Hashimoto, Kuniyasu Nakamura | 2007-06-05 |
| 7141790 | Defect inspection instrument and positron beam apparatus | Masanari Koguchi | 2006-11-28 |
| 6888139 | Electron microscope | Masanari Koguchi, Isao Nagaoki, Hiroyuki Kobayashi | 2005-05-03 |
| 6838667 | Method and apparatus for charged particle beam microscopy | Masanari Koguchi, Mari Nozoe, Muneyuki Fukuda, Mitsugu Sato | 2005-01-04 |
| 6570156 | Autoadjusting electron microscope | Masanari Koguchi, Isao Nagaoki, Hiroyuki Kobayashi | 2003-05-27 |
| 6051834 | Electron microscope | Hiroshi Kakibayashi, Yasuhiro Mitsui, Hideo Todokoro, Katsuhiro Kuroda, Masanari Koguchi +7 more | 2000-04-18 |
| 5866905 | Electron microscope | Hiroshi Kakibayashi, Yasuhiro Mitsui, Hideo Todokoro, Katsuhiro Kuroda, Masanari Koguchi +7 more | 1999-02-02 |
| 5650621 | Electron microscope | Hiroshi Kakibayashi | 1997-07-22 |
| 5453617 | Electron microscope for specimen composition and strain analysis and observation method thereof | Hiroshi Kakibayashi | 1995-09-26 |