Issued Patents All Time
Showing 25 most recent of 73 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8907278 | Charged particle beam applied apparatus, and irradiation method | Momoyo Enyama, Hiroya Ota, Taku Ninomiya | 2014-12-09 |
| 8558173 | Method of inspecting pattern and inspecting instrument | Hidetoshi Nishiyama, Shigeaki Hijikata, Kenji Watanabe, Koji Abe | 2013-10-15 |
| 8552373 | Charged particle beam device and sample observation method | Momoyo Enyama, Hiroya Ohta, Taku Ninomiya | 2013-10-08 |
| 8421008 | Pattern check device and pattern check method | Hiroshi Miyai, Mitsuru Okamura, Makoto Suzuki, Yusuke Ominami | 2013-04-16 |
| 7952074 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda, Yutaka Kaneko +12 more | 2011-05-31 |
| 7876113 | Method of inspecting pattern and inspecting instrument | Mitsuo Suga, Yoichiro Neo, Hidetoshi Nishiyama | 2011-01-25 |
| 7526747 | Inspection method and inspection system using charged particle beam | Hidetoshi Nishiyama, Hiroyuki Shinada | 2009-04-28 |
| 7521679 | Inspection method and inspection system using charged particle beam | Hidetoshi Nishiyama | 2009-04-21 |
| 7417444 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda, Yutaka Kaneko +12 more | 2008-08-26 |
| 7397031 | Method of inspecting a circuit pattern and inspecting instrument | Hiroyuki Shinada, Atsuko Takafuji, Takanori Ninomiya, Yuko Sasaki, Hisaya Murakoshi +5 more | 2008-07-08 |
| 7394070 | Method and apparatus for inspecting patterns | Yasunori Goto, Zhaohui Cheng | 2008-07-01 |
| 7375538 | Method of inspecting pattern and inspecting instrument | — | 2008-05-20 |
| 7276693 | Inspection method and apparatus using charged particle beam | Hikaru Koyama, Hidetoshi Nishiyama | 2007-10-02 |
| 7271385 | Inspection method and inspection apparatus using electron beam | Yasuhiro Gunji, Taku Ninomiya, Ryuichi Funatsu, Yoshikazu Inada, Kenjirou Yamamoto | 2007-09-18 |
| 7260256 | Method and system for inspecting a pattern | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Hiroyuki Shinada +2 more | 2007-08-21 |
| 7242015 | Patterned wafer inspection method and apparatus therefor | Hiroyuki Shinada, Yusuke Yajima, Hisaya Murakoshi, Masaki Hasegawa, Atsuko Takafuji +4 more | 2007-07-10 |
| 7218126 | Inspection method and apparatus for circuit pattern | Zhaohui Cheng | 2007-05-15 |
| 7211797 | Inspection method and inspection system using charged particle beam | Hidetoshi Nishiyama | 2007-05-01 |
| 7122796 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama +3 more | 2006-10-17 |
| 7116817 | Method and apparatus for inspecting a semiconductor device | Maki Tanaka, Masahiro Watanabe, Kenji Watanabe, Hiroshi Miyai | 2006-10-03 |
| 7116816 | Method of inspecting a pattern and an apparatus thereof and a method of processing a specimen | Maki Tanaka, Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Hiroshi Morioka +2 more | 2006-10-03 |
| 7112791 | Method of inspecting pattern and inspecting instrument | Hidetoshi Nishiyama, Shigeaki Hijikata, Kenji Watanabe, Koji Abe | 2006-09-26 |
| 7098455 | Method of inspecting a circuit pattern and inspecting instrument | Hiroyuki Shinada, Atsuko Takafuji, Takanori Ninomiya, Yuko Sasaki, Hisaya Murakoshi +5 more | 2006-08-29 |
| 7026830 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda, Yutaka Kaneko +12 more | 2006-04-11 |
| 7019294 | Inspection method and apparatus using charged particle beam | Hikaru Koyama, Hidetoshi Nishiyama | 2006-03-28 |