Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11276551 | Inspection device | Atsuko Shintani, Yasunari Sohda, Noritsugu Takahashi | 2022-03-15 |
| 11170332 | Data analysis system and apparatus for analyzing manufacturing defects based on key performance indicators | Toshio Okochi, Toshihiro Kujirai | 2021-11-09 |
| 10840060 | Scanning electron microscope and sample observation method | Zhaohui Cheng, Yoshinobu Kimura, Hiroyuki Shinada, Osamu Komuro | 2020-11-17 |
| 10734261 | Search apparatus and search method | Takeshi Ohmori, Junichi Tanaka, Masaru Kurihara | 2020-08-04 |
| 9991092 | Scanning electron microscope and sample observation method | Zhaohui Cheng, Yoshinobu Kimura, Hiroyuki Shinada, Osamu Komuro | 2018-06-05 |
| 7655906 | Method and apparatus for scanning and measurement by electron beam | Zhaohui Cheng, Hiroshi Makino, Mitsugu Sato | 2010-02-02 |
| 7652248 | Inspection apparatus and inspection method | Hiroshi Makino, Kenji Tanimoto, Zhaohui Cheng | 2010-01-26 |
| 7547884 | Pattern defect inspection method and apparatus thereof | Masaki Hasegawa, Hiroshi Makino, Zhaohui Cheng, Hisaya Murakoshi | 2009-06-16 |
| 7501625 | Electron microscope application apparatus and sample inspection method | Hiroshi Makino, Mitsugu Sato | 2009-03-10 |
| 7276693 | Inspection method and apparatus using charged particle beam | Hidetoshi Nishiyama, Mari Nozoe | 2007-10-02 |
| 7019294 | Inspection method and apparatus using charged particle beam | Hidetoshi Nishiyama, Mari Nozoe | 2006-03-28 |