Issued Patents All Time
Showing 1–25 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394585 | Electron source, electron gun, and charged particle beam device | Keigo Kasuya, Shuhei Ishikawa, Takashi Doi, Soichiro Matsunaga, Hiroshi Morita +2 more | 2025-08-19 |
| 12394586 | Charged particle beam device | Makoto Sakakibara, Momoyo Enyama, Hajime Kawano, Makoto Suzuki, Yuko Sasaki | 2025-08-19 |
| 12174551 | Pattern measurement device and pattern measurement method | Takuma Yamamoto, Hiroya Ohta, Yusuke Abe, Tomohiro Tamori, Masaaki Nojiri | 2024-12-24 |
| 12068128 | Charged particle beam system | Yusuke Nakamura, Yusuke Abe, Takeyoshi Ohashi | 2024-08-20 |
| 11670479 | Electron microscope and method of adjusting focus of electron microscope | Takeyoshi Ohashi, Hyejin Kim, Yusuke Abe | 2023-06-06 |
| 11626266 | Charged particle beam device | Keiichiro Hitomi, Yusuke Abe, Takuma Yamamoto, Kei Sakai, Satoru Yamaguchi +2 more | 2023-04-11 |
| 11601021 | Stator and motor | Mitsuo Saitoh, Naoki Nojiri, Hideaki Hamada, Fumihiko Kawai, Yukio Nishikawa | 2023-03-07 |
| 11353798 | Pattern measurement device and pattern measurement method | Takuma Yamamoto, Hiroya Ohta, Yusuke Abe, Tomohiro Tamori, Masaaki Nojiri | 2022-06-07 |
| 11276554 | Scanning electron microscope and method for measuring pattern | Takeyoshi Ohashi, Yusuke Abe, Kaori Bizen, Hyejin Kim | 2022-03-15 |
| 11251018 | Scanning electron microscope | Yasunari Sohda, Kaori Bizen, Yusuke Abe | 2022-02-15 |
| 10903037 | Charged particle beam device | Keigo Kasuya, Shuhei Ishikawa, Hajime Kawano, Hideo Todokoro, Souichi Katagiri +2 more | 2021-01-26 |
| 10816332 | Pattern measurement device and pattern measurement method | Hiroya Ohta, Tomohiro Tamori, Takuma Yamamoto | 2020-10-27 |
| 10636618 | Charged particle beam apparatus | Kaori Bizen, Yasunari Sohda, Makoto Sakakibara, Hiroya Ohta, Yusuke Abe | 2020-04-28 |
| 10629408 | Charged particle beam device | Toshimasa Kameda, Hiroya Ohta | 2020-04-21 |
| 10170273 | Charged particle beam device, and method of manufacturing component for charged particle beam device | Takashi Ichimura, Hiroyuki Ito, Shinichi Kato, Hisaya Murakoshi, Tadashi Fujieda +3 more | 2019-01-01 |
| 9224575 | Charged particle beam device and overlay misalignment measurement method | Takuma Yamamoto, Tomohiro Funakoshi | 2015-12-29 |
| 8536540 | Charged particle beam apparatus and method for stably obtaining charged particle beam image | Makoto Suzuki, Takuma Yamamoto | 2013-09-17 |
| 8323368 | Production method of polishing composition | Noriyuki Takakuma, Isao Ota | 2012-12-04 |
| 7887714 | Cerium oxide sol and abrasive | Isao Ota, Tohru Nishimura | 2011-02-15 |
| 7765817 | Refrigeration system | Masaaki Takegami, Satoru Sakae | 2010-08-03 |
| 7752864 | Refrigeration apparatus | Masaaki Takegami, Takeo Ueno, Satoru Sakae | 2010-07-13 |
| 7728294 | Semiconductor wafer inspection tool and semiconductor wafer inspection method | Takashi Hiroi, Yuko Sasaki, Hiroshi Makino | 2010-06-01 |
| 7683319 | Charge control apparatus and measurement apparatus equipped with the charge control apparatus | Hiroshi Makino, Zhaohui Cheng, Hideo Todokoro | 2010-03-23 |
| 7678703 | Production method of polishing composition | Noriyuki Takakura, Isao Ota | 2010-03-16 |
| 7652248 | Inspection apparatus and inspection method | Hiroshi Makino, Zhaohui Cheng, Hikaru Koyama | 2010-01-26 |