Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347074 | Pattern measurement system, pattern measurement method, and program for measuring edge roughness at the edge of a pattern based on a random noise component | Kei Sakai, Junichi Kakuta | 2025-07-01 |
| 10665420 | Charged particle beam apparatus | Yasunori Takasugi, Satoru Yamaguchi, Kei Sakai, Hideki ITAI, Yoshinori Momonoi +1 more | 2020-05-26 |
| 10629408 | Charged particle beam device | Hiroya Ohta, Kenji Tanimoto | 2020-04-21 |