Issued Patents All Time
Showing 1–25 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400383 | Training method for learning apparatus, and image generation system | Zhaohui Cheng, Yasutaka Toyoda, Hideto Dohi, Hideyuki Kazumi | 2025-08-26 |
| 12205790 | Charged particle beam device | Momoyo Enyama, Makoto Sakakibara, Hajime Kawano | 2025-01-21 |
| 12174551 | Pattern measurement device and pattern measurement method | Takuma Yamamoto, Kenji Tanimoto, Yusuke Abe, Tomohiro Tamori, Masaaki Nojiri | 2024-12-24 |
| 11869745 | Charged particle beam device | Minami Shouji, Natsuki Tsuno, Daisuke Bizen | 2024-01-09 |
| 11435178 | Calibration sample, electron beam adjustment method and electron beam apparatus using same | Yasunari Sohda, Yoshinori Nakayama, Kaori Bizen, Yusuke Abe | 2022-09-06 |
| 11353798 | Pattern measurement device and pattern measurement method | Takuma Yamamoto, Kenji Tanimoto, Yusuke Abe, Tomohiro Tamori, Masaaki Nojiri | 2022-06-07 |
| 10816332 | Pattern measurement device and pattern measurement method | Kenji Tanimoto, Tomohiro Tamori, Takuma Yamamoto | 2020-10-27 |
| 10636618 | Charged particle beam apparatus | Kaori Bizen, Yasunari Sohda, Makoto Sakakibara, Kenji Tanimoto, Yusuke Abe | 2020-04-28 |
| 10629408 | Charged particle beam device | Toshimasa Kameda, Kenji Tanimoto | 2020-04-21 |
| 10262830 | Scanning electron microscope and electron trajectory adjustment method therefor | Daisuke Bizen, Hideo Morishita, Michio Hatano | 2019-04-16 |
| 9991088 | Charged particle beam device and aberration corrector | Yasuhiro Shirasaki, Momoyo Enyama | 2018-06-05 |
| 9966225 | Charged particle beam device, simulation method, and simulation device | Daisuke Bizen, Makoto Sakakibara, Junichi Tanaka | 2018-05-08 |
| 9846133 | Semiconductor inspection device including a counter electrode with adjustable potentials used to obtain images for detection of defects, and inspection method using charged particle beam | Yoshinobu Kimura, Natsuki Tsuno, Renichi Yamada, Toshiyuki Ohno, Yuki Mori | 2017-12-19 |
| 9508611 | Semiconductor inspection method, semiconductor inspection device and manufacturing method of semiconductor element | Yoshinobu Kimura, Natsuki Tsuno, Renichi Yamada, Hirotaka Hamamura, Toshiyuki Ohno +2 more | 2016-11-29 |
| 8592776 | Charged particle beam apparatus | Momoyo Enyama, Osamu Kamimura | 2013-11-26 |
| 8552373 | Charged particle beam device and sample observation method | Momoyo Enyama, Taku Ninomiya, Mari Nozoe | 2013-10-08 |
| 8350214 | Charged particle beam applied apparatus | Hiroki Otaki, Momoyo Enyama | 2013-01-08 |
| 8330103 | Charged particle beam apparatus and specimen inspection method | Momoyo Enyama | 2012-12-11 |
| 8288722 | Electron beam inspection method and electron beam inspection apparatus | Masaki Hasegawa | 2012-10-16 |
| 8268209 | Pattern forming method and its mold | Masahiko Ogino, Akihiro Miyauchi, Takashi Ando, Chiseki Haginoya, Susumu Komoriya +3 more | 2012-09-18 |
| 8193493 | Charged particle beam apparatus | Sayaka Tanimoto, Hiroshi Makino, Ryuichi Funatsu | 2012-06-05 |
| 8022365 | Charged particle beam equipments, and charged particle beam microscope | Osamu Kamimura | 2011-09-20 |
| 7906761 | Charged particle beam apparatus | Sayaka Tanimoto, Hiroshi Makino, Ryuichi Funatsu | 2011-03-15 |
| 7880143 | Electron beam apparatus | Sayaka Tanimoto, Hiroshi Makino, Ryuichi Funatsu | 2011-02-01 |
| 7863565 | Electron beam inspection method and electron beam inspection apparatus | Masaki Hasegawa | 2011-01-04 |