Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12174551 | Pattern measurement device and pattern measurement method | Takuma Yamamoto, Hiroya Ohta, Kenji Tanimoto, Yusuke Abe, Tomohiro Tamori | 2024-12-24 |
| 11353798 | Pattern measurement device and pattern measurement method | Takuma Yamamoto, Hiroya Ohta, Kenji Tanimoto, Yusuke Abe, Tomohiro Tamori | 2022-06-07 |
| 8421010 | Charged particle beam device for scanning a sample using a charged particle beam to inspect the sample | Takashi Hiroi, Yasuhiro Gunji, Hiroshi Miyai | 2013-04-16 |
| 8134697 | Inspection apparatus for inspecting patterns of substrate | Koichi Hayakawa | 2012-03-13 |
| 8036447 | Inspection apparatus for inspecting patterns of a substrate | Koichi Hayakawa, Hiroshi Miyai, Michio Nakano, Takako Fujisawa, Dai Fujii | 2011-10-11 |
| 7696487 | Circuit pattern inspection apparatus | Koichi Hayakawa, Jiro Inoue | 2010-04-13 |
| 7532328 | Circuit-pattern inspection apparatus | Yasuhiko Nara, Kouichi Hayakawa, Takashi Hiroi | 2009-05-12 |
| 7292327 | Circuit-pattern inspection apparatus | Yasuhiko Nara, Kouichi Hayakawa, Takashi Hiroi | 2007-11-06 |
| 7223975 | Inspection apparatus for circuit pattern | Yasuhiko Nara, Kouichi Hayakawa, Hiroyuki Shinada, Yukio Hagita | 2007-05-29 |