Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12174245 | Recipe information presentation system and recipe error inference system | Masami TAKANO, Kazuhiro Ueda, Masayoshi Ishikawa, Yasuhiro Yoshida | 2024-12-24 |
| 8234651 | Information processing method and apparatus using the same | — | 2012-07-31 |
| 7532328 | Circuit-pattern inspection apparatus | Yasuhiko Nara, Masaaki Nojiri, Takashi Hiroi | 2009-05-12 |
| 7348558 | Charged particle beam apparatus and automatic astigmatism adjustment method | Masahiro Watanabe, Hiroyuki Shinada, Atsuko Takafuji, Masami Iizuka, Yasuhiro Gunji +1 more | 2008-03-25 |
| 7292327 | Circuit-pattern inspection apparatus | Yasuhiko Nara, Masaaki Nojiri, Takashi Hiroi | 2007-11-06 |
| 7223975 | Inspection apparatus for circuit pattern | Yasuhiko Nara, Masaaki Nojiri, Hiroyuki Shinada, Yukio Hagita | 2007-05-29 |
| 7030394 | Charged particle beam apparatus and automatic astigmatism adjustment method | Masahiro Watanabe, Hiroyuki Shinada, Atsuko Takafuji, Masami Iizuka, Yasuhiro Gunji +1 more | 2006-04-18 |
| 6825480 | Charged particle beam apparatus and automatic astigmatism adjustment method | Masahiro Watanabe, Hiroyuki Shinada, Atsuko Takafuji, Masami Iizuka, Yasuhiro Gunji +1 more | 2004-11-30 |