Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8604430 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2013-12-10 |
| 8134125 | Method and apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2012-03-13 |
| 7952074 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2011-05-31 |
| 7439506 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2008-10-21 |
| 7439504 | Pattern inspection method and apparatus using electron beam | Takashi Hiroi, Asahiro Kuni, Masahiro Watanabe, Chie Shishido, Hiroyuki Shinada +1 more | 2008-10-21 |
| 7417444 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2008-08-26 |
| 7397031 | Method of inspecting a circuit pattern and inspecting instrument | Hiroyuki Shinada, Takanori Ninomiya, Yuko Sasaki, Mari Nozoe, Hisaya Murakoshi +5 more | 2008-07-08 |
| 7348558 | Charged particle beam apparatus and automatic astigmatism adjustment method | Masahiro Watanabe, Hiroyuki Shinada, Masami Iizuka, Yasuhiro Gunji, Kouichi Hayakawa +1 more | 2008-03-25 |
| 7242015 | Patterned wafer inspection method and apparatus therefor | Hiroyuki Shinada, Yusuke Yajima, Hisaya Murakoshi, Masaki Hasegawa, Mari Nozoe +4 more | 2007-07-10 |
| 7232996 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2007-06-19 |
| 7098455 | Method of inspecting a circuit pattern and inspecting instrument | Hiroyuki Shinada, Takanori Ninomiya, Yuko Sasaki, Mari Nozoe, Hisaya Murakoshi +5 more | 2006-08-29 |
| 7030394 | Charged particle beam apparatus and automatic astigmatism adjustment method | Masahiro Watanabe, Hiroyuki Shinada, Masami Iizuka, Yasuhiro Gunji, Kouichi Hayakawa +1 more | 2006-04-18 |
| 7026830 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2006-04-11 |
| 7012252 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2006-03-14 |
| 6987265 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2006-01-17 |
| 6979823 | Patterned wafer inspection method and apparatus therefor | Hiroyuki Shinada, Yusuke Yajima, Hisaya Murakoshi, Masaki Hasegawa, Mari Nozoe +4 more | 2005-12-27 |
| 6940069 | Pattern inspection method and apparatus using electron beam | Takashi Hiroi, Asahiro Kuni, Masahiro Watanabe, Chie Shishido, Hiroyuki Shinada +1 more | 2005-09-06 |
| 6825480 | Charged particle beam apparatus and automatic astigmatism adjustment method | Masahiro Watanabe, Hiroyuki Shinada, Masami Iizuka, Yasuhiro Gunji, Kouichi Hayakawa +1 more | 2004-11-30 |
| 6797954 | Patterned wafer inspection method and apparatus therefor | Hiroyuki Shinada, Yusuke Yajima, Hisaya Murakoshi, Masaki Hasegawa, Mari Nozoe +4 more | 2004-09-28 |
| 6768113 | WORKPIECE HOLDER, SEMICONDUCTOR FABRICATING APPARATUS, SEMICONDUCTOR INSPECTING APPARATUS, CIRCUIT PATTERN INSPECTING APPARATUS, CHARGED PARTICLE BEAM APPLICATION APPARATUS, CALIBRATING SUBSTRATE, WORKPIECE HOLDING METHOD, CIRCUIT PATTERN INSPECTING METHOD, AND CHARGED PARTICLE BEAM APPLICATION METHOD | Hiroyuki Suzuki, Hiroyuki Shinada, Yasutsugu Usami, Shuji Sugiyama | 2004-07-27 |
| 6700122 | Wafer inspection system and wafer inspection process using charged particle beam | Miyako Matsui, Mari Nozoe | 2004-03-02 |
| 6614022 | Pattern inspection method and apparatus using electron beam | Takashi Hiroi, Asahiro Kuni, Masahiro Watanabe, Chie Shishido, Hiroyuki Shinada +1 more | 2003-09-02 |
| 6583413 | Method of inspecting a circuit pattern and inspecting instrument | Hiroyuki Shinada, Takanori Ninomiya, Yuko Sasaki, Mari Nozoe, Hisaya Murakoshi +5 more | 2003-06-24 |
| 6559663 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2003-05-06 |
| 6512227 | Method and apparatus for inspecting patterns of a semiconductor device with an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2003-01-28 |