Issued Patents All Time
Showing 25 most recent of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840060 | Scanning electron microscope and sample observation method | Zhaohui Cheng, Hikaru Koyama, Yoshinobu Kimura, Osamu Komuro | 2020-11-17 |
| 9991092 | Scanning electron microscope and sample observation method | Zhaohui Cheng, Hikaru Koyama, Yoshinobu Kimura, Osamu Komuro | 2018-06-05 |
| 8604430 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2013-12-10 |
| 8212227 | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus | Masahiro Watanabe, Takashi Hiroi, Maki Tanaka, Yasutsugu Usami | 2012-07-03 |
| 8134125 | Method and apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2012-03-13 |
| 7982188 | Apparatus and method for wafer pattern inspection | Hisaya Murakoshi, Hideo Todokoro, Hiroshi Makino, Yoshihiro Anan | 2011-07-19 |
| 7952074 | Method and apparatus for inspecting integrated circuit pattern | Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda, Yutaka Kaneko +12 more | 2011-05-31 |
| 7692144 | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus | Masahiro Watanabe, Takashi Hiroi, Maki Tanaka, Yasutsugu Usami | 2010-04-06 |
| 7526747 | Inspection method and inspection system using charged particle beam | Hidetoshi Nishiyama, Mari Nozoe | 2009-04-28 |
| 7439504 | Pattern inspection method and apparatus using electron beam | Takashi Hiroi, Asahiro Kuni, Masahiro Watanabe, Chie Shishido, Yasuhiro Gunji +1 more | 2008-10-21 |
| 7439506 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2008-10-21 |
| 7417444 | Method and apparatus for inspecting integrated circuit pattern | Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda, Yutaka Kaneko +12 more | 2008-08-26 |
| 7411190 | Inspection system, inspection method, and process management method | Hiroshi Makino, Hisaya Murakoshi, Hideo Todokoro | 2008-08-12 |
| 7397031 | Method of inspecting a circuit pattern and inspecting instrument | Atsuko Takafuji, Takanori Ninomiya, Yuko Sasaki, Mari Nozoe, Hisaya Murakoshi +5 more | 2008-07-08 |
| 7348558 | Charged particle beam apparatus and automatic astigmatism adjustment method | Masahiro Watanabe, Atsuko Takafuji, Masami Iizuka, Yasuhiro Gunji, Kouichi Hayakawa +1 more | 2008-03-25 |
| 7329889 | Electron beam apparatus and method with surface height calculator and a dual projection optical unit | Masahiro Watanabe, Takashi Hiroi, Maki Tanaka, Yasutsugu Usami | 2008-02-12 |
| 7260256 | Method and system for inspecting a pattern | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Mari Nozoe +2 more | 2007-08-21 |
| 7242015 | Patterned wafer inspection method and apparatus therefor | Yusuke Yajima, Hisaya Murakoshi, Masaki Hasegawa, Mari Nozoe, Atsuko Takafuji +4 more | 2007-07-10 |
| 7232996 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2007-06-19 |
| 7223975 | Inspection apparatus for circuit pattern | Yasuhiko Nara, Masaaki Nojiri, Kouichi Hayakawa, Yukio Hagita | 2007-05-29 |
| 7122796 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama +3 more | 2006-10-17 |
| 7098455 | Method of inspecting a circuit pattern and inspecting instrument | Atsuko Takafuji, Takanori Ninomiya, Yuko Sasaki, Mari Nozoe, Hisaya Murakoshi +5 more | 2006-08-29 |
| 7075076 | Inspection system, inspection method, and process management method | Hiroshi Makino, Hisaya Murakoshi, Hideo Todokoro | 2006-07-11 |
| 7030394 | Charged particle beam apparatus and automatic astigmatism adjustment method | Masahiro Watanabe, Atsuko Takafuji, Masami Iizuka, Yasuhiro Gunji, Kouichi Hayakawa +1 more | 2006-04-18 |
| 7026830 | Method and apparatus for inspecting integrated circuit pattern | Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda, Yutaka Kaneko +12 more | 2006-04-11 |