Issued Patents All Time
Showing 25 most recent of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112963 | Defect inspection apparatus and defect inspection program | Nobuaki Hirose, Takahiro Urano | 2024-10-08 |
| 12039716 | Defect inspection method and defect inspection device | Takahiro Urano, Nobuaki Hirose | 2024-07-16 |
| 11788973 | Defect inspection device and defect inspection method | Nobuaki Hirose, Takahiro Urano | 2023-10-17 |
| 11041815 | Inspection information generation device, inspection information generation method, and defect inspection device | Takahiro Urano, Toshifumi Honda, Nobuaki Hirose | 2021-06-22 |
| 9858659 | Pattern inspecting and measuring device and program | Tsuyoshi Minakawa, Takeyuki Yoshida, Taku Ninomiya, Takuma Yamamoto, Hiroyuki Shindo +3 more | 2018-01-02 |
| 9188554 | Pattern inspection device and pattern inspection method | Chie Shishido, Shinya Murakami, Taku Ninomiya, Michio Nakano | 2015-11-17 |
| 8953868 | Defect inspection method and defect inspection apparatus | Shinya Murakami, Chie Shishido, Taku Ninomiya, Tsuyoshi Minakawa, Atsushi Miyamoto | 2015-02-10 |
| 8853628 | Defect inspection method, and device thereof | Naoki Hosoya, Toshifumi Honda | 2014-10-07 |
| 8658987 | Circuit-pattern inspection device | Takuma Yamamoto, Yusuke Ominami | 2014-02-25 |
| 8509516 | Circuit pattern examining apparatus and circuit pattern examining method | Takeyuki Yoshida, Naoki Hosoya, Toshifumi Honda | 2013-08-13 |
| 8421010 | Charged particle beam device for scanning a sample using a charged particle beam to inspect the sample | Yasuhiro Gunji, Hiroshi Miyai, Masaaki Nojiri | 2013-04-16 |
| 8212227 | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus | Masahiro Watanabe, Maki Tanaka, Hiroyuki Shinada, Yasutsugu Usami | 2012-07-03 |
| 8121395 | Inspection apparatus and an inspection method for inspecting a circuit pattern | Takeyuki Yoshida, Naoki Hosoya, Toshifumi Honda | 2012-02-21 |
| 8111902 | Method and apparatus for inspecting defects of circuit patterns | Naoki Hosoya, Hirohito Okuda, Koichi Hayakawa, Fumihiko Fukunaga | 2012-02-07 |
| 7957579 | Pattern inspection method and apparatus | Masahiro Watanabe, Chie Shishido, Aritoshi Sugimoto, Maki Tanaka, Hiroshi Miyai +2 more | 2011-06-07 |
| 7952074 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2011-05-31 |
| 7894658 | Pattern inspection method and apparatus | Masahiro Watanabe, Chie Shishido, Aritoshi Sugimoto, Maki Tanaka, Hiroshi Miyai +2 more | 2011-02-22 |
| 7889911 | Image processing unit for wafer inspection tool | Michio Nakano, Shigeya Tanaka, Yoshiyuki Momiyama, Kazuya Hayashi, Dai Fujii +3 more | 2011-02-15 |
| 7728294 | Semiconductor wafer inspection tool and semiconductor wafer inspection method | Kenji Tanimoto, Yuko Sasaki, Hiroshi Makino | 2010-06-01 |
| 7692144 | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus | Masahiro Watanabe, Maki Tanaka, Hiroyuki Shinada, Yasutsugu Usami | 2010-04-06 |
| 7602962 | Method of classifying defects using multiple inspection machines | Atsushi Miyamoto, Hirohito Okuda, Toshifumi Honda, Yuji Takagi | 2009-10-13 |
| 7532328 | Circuit-pattern inspection apparatus | Yasuhiko Nara, Masaaki Nojiri, Kouichi Hayakawa | 2009-05-12 |
| 7521676 | Method and apparatus for inspecting pattern defects and mirror electron projection type or multi-beam scanning type electron beam apparatus | Hirohito Okuda, Masaki Hasegawa, Shigeya Tanaka | 2009-04-21 |
| 7457453 | Pattern inspection method and apparatus | Masahiro Watanabe, Chie Shishido, Aritoshi Sugimoto, Maki Tanaka, Hiroshi Miyai +2 more | 2008-11-25 |
| 7439504 | Pattern inspection method and apparatus using electron beam | Asahiro Kuni, Masahiro Watanabe, Chie Shishido, Hiroyuki Shinada, Yasuhiro Gunji +1 more | 2008-10-21 |