Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8111902 | Method and apparatus for inspecting defects of circuit patterns | Takashi Hiroi, Naoki Hosoya, Koichi Hayakawa, Fumihiko Fukunaga | 2012-02-07 |
| 7873205 | Apparatus and method for classifying defects using multiple classification modules | Yuji Takagi, Toshifumi Honda, Atsushi Miyamoto, Takehiro Hirai | 2011-01-18 |
| 7756320 | Defect classification using a logical equation for high stage classification | Toshifumi Honda, Atsushi Miyamoto | 2010-07-13 |
| 7734082 | Defect inspection method | Toshifumi Honda | 2010-06-08 |
| 7602962 | Method of classifying defects using multiple inspection machines | Atsushi Miyamoto, Toshifumi Honda, Yuji Takagi, Takashi Hiroi | 2009-10-13 |
| 7583832 | Method and its apparatus for classifying defects | Toshifumi Honda, Yuji Takagi, Atsushi Miyamoto | 2009-09-01 |
| 7521676 | Method and apparatus for inspecting pattern defects and mirror electron projection type or multi-beam scanning type electron beam apparatus | Takashi Hiroi, Masaki Hasegawa, Shigeya Tanaka | 2009-04-21 |
| 7424146 | Defect inspection method | Toshifumi Honda | 2008-09-09 |
| 7420167 | Apparatus and method for electron beam inspection with projection electron microscopy | Takashi Hiroi, Hiroshi Makino | 2008-09-02 |
| 7231079 | Method and system for inspecting electronic circuit pattern | Yuji Takagi, Masahiro Watanabe, Shunji Maeda, Minori Noguchi, Yoshimasa Ooshima +1 more | 2007-06-12 |
| 7205555 | Defect inspection apparatus and defect inspection method | Yuji Takagi, Toshifumi Honda | 2007-04-17 |
| 7181060 | Defect inspection method | Toshifumi Honda, Yasuhiko Ozawa, Katsuhiro Kitahashi | 2007-02-20 |
| 7170593 | Method of reviewing detected defects | Toshifumi Honda, Yuji Takagi | 2007-01-30 |
| 7075077 | Method of observing a specimen using a scanning electron microscope | Toshifumi Honda, Kazuo Aoki, Kohei Yamaguchi, Masashi Sakamoto | 2006-07-11 |
| 7034299 | Transmission electron microscope system and method of inspecting a specimen using the same | Ryo Nakagaki, Yuji Takagi, Hiroshi Kakibayashi | 2006-04-25 |
| 6965429 | Method of reviewing detected defects | Toshifumi Honda, Yuji Takagi | 2005-11-15 |
| 6855930 | Defect inspection apparatus and defect inspection method | Yuji Takagi, Toshifumi Honda | 2005-02-15 |
| 6622054 | Method monitoring a quality of electronic circuits and its manufacturing condition and system for it | Toshifumi Honda, Hisae Yamamura, Yuji Takagi, Hideaki Doi, Shigeshi Yoshinaga | 2003-09-16 |