Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8666165 | Scanning electron microscope | Satoru Yamaguchi, Takashi Iizumi, Osamu Komuro, Hidetoshi Morokuma, Tatsuya Maeda +1 more | 2014-03-04 |
| 8428336 | Inspecting method, inspecting system, and method for manufacturing electronic devices | Yoko Ikeda, Junko Konishi, Hisafumi Iwata, Yuji Takagi, Kenji Obara +2 more | 2013-04-23 |
| 8263935 | Charged particle beam apparatus | Atsushi Takane, Mitsuji Ikeda, Satoru Yamaguchi | 2012-09-11 |
| 8188429 | Scanning electron microscope for determining quality of a semiconductor pattern | — | 2012-05-29 |
| 7652249 | Charged particle beam apparatus | Atsushi Takane, Mitsuji Ikeda, Satoru Yamaguchi | 2010-01-26 |
| 7605381 | Charged particle beam alignment method and charged particle beam apparatus | Mitsugu Sato, Tadashi Otaka, Makoto Ezumi, Atsushi Takane, Shoji Yoshida +1 more | 2009-10-20 |
| 7439505 | Scanning electron microscope | Satoru Yamaguchi, Takashi Iizumi, Osamu Komuro, Hidetoshi Morokuma, Tatsuya Maeda +1 more | 2008-10-21 |
| 7356177 | Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus | Kenji Obara, Yuji Takagi, Ryo Nakagaki, Toshiei Kurosaki, Seiji Isogai | 2008-04-08 |
| 7352890 | Method for analyzing circuit pattern defects and a system thereof | Atsushi Shimoda, Ichirou Ishimaru, Yuji Takagi, Takuo Tamura, Yuichi Hamamura +2 more | 2008-04-01 |
| 7235782 | Semiconductor inspection system | Atsushi Takane, Haruo Yoda, Shoji Yoshida, Mitsuji Ikeda | 2007-06-26 |
| 7181060 | Defect inspection method | Toshifumi Honda, Hirohito Okuda, Katsuhiro Kitahashi | 2007-02-20 |
| 7166840 | Method for determining depression/protrusion of sample and charged particle beam apparatus therefor | Atsushi Takane, Satoru Yamaguchi, Osamu Komuro, Hideo Todokoro | 2007-01-23 |
| 7068834 | Inspecting method, inspecting system, and method for manufacturing electronic devices | Yoko Ikeda, Junko Konishi, Hisafumi Iwata, Yuji Takagi, Kenji Obara +2 more | 2006-06-27 |
| 7062081 | Method and system for analyzing circuit pattern defects | Atsushi Shimoda, Ichirou Ishimaru, Yuji Takagi, Takuo Tamura, Yuichi Hamamura +2 more | 2006-06-13 |
| 7026615 | Semiconductor inspection system | Atsushi Takane, Haruo Yoda, Shoji Yoshida, Mitsuji Ikeda | 2006-04-11 |
| 7002151 | Scanning electron microscope | Satoru Yamaguchi, Takashi Iizumi, Osamu Komuro, Hidetoshi Morokuma, Tatsuya Maeda +1 more | 2006-02-21 |
| 6872943 | Method for determining depression/protrusion of sample and charged particle beam apparatus therefor | Atsushi Takane, Satoru Yamaguchi, Osamu Komuro, Hideo Todokoro | 2005-03-29 |
| 6864493 | Charged particle beam alignment method and charged particle beam apparatus | Mitsugu Sato, Tadashi Otaka, Makoto Ezumi, Atsushi Takane, Shoji Yoshida +1 more | 2005-03-08 |
| 6803573 | Scanning electron microscope | Satoru Yamaguchi, Takashi Iizumi, Osamu Komuro, Hidetoshi Morokuma, Tatsuya Maeda +1 more | 2004-10-12 |
| 6756589 | Method for observing specimen and device therefor | Kenji Obara, Yuji Takagi, Atsushi Shimoda, Ryou Nakagaki, Seiji Isogai +3 more | 2004-06-29 |
| 6627888 | Scanning electron microscope | Satoru Yamaguchi, Takashi Iizumi, Osamu Komuro, Hidetoshi Morokuma, Tatsuya Maeda +1 more | 2003-09-30 |
| 6553323 | Method and its apparatus for inspecting a specimen | Kenji Obara, Yuji Takagi, Toshifumi Honda, Ryo Nakagaki, Toshiei Kurosaki | 2003-04-22 |
| 6476388 | Scanning electron microscope having magnification switching control | Ryo Nakagaki, Yuji Takagi, Atsushi Shimoda, Kenji Obara, Hideka Bamba +4 more | 2002-11-05 |
| RE34495 | NMR imaging method | Koichi Sano, Tetsuo Yokoyama, Ryuzaburo Takeda, Shinichi Sato, Hideaki Koizumi | 1994-01-04 |
| 5049940 | Image forming apparatus | Yasuyoshi Yamaguchi, Masataka Suzuki, Akira Sato, Yoshinori Asai, Yoshiharu Horii +1 more | 1991-09-17 |