Issued Patents All Time
Showing 1–25 of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195694 | Charged particle beam system, method for determining range for automatically searching for focal point position in charged particle beam device, and non-transitory storage medium recording program for causing computer system to determine range for automatically searching for focal position in charged particle beam device | Kosuke Matsumoto, Takashi Nobuhara, Hirohiko Kitsuki | 2021-12-07 |
| 9685301 | Charged-particle radiation apparatus | Takehiro Hirai, Ryo Nakagaki | 2017-06-20 |
| 9582875 | Defect analysis assistance device, program executed by defect analysis assistance device, and defect analysis system | Takehiro Hirai, Ryo Nakagaki | 2017-02-28 |
| 9335277 | Region-of-interest determination apparatus, observation tool or inspection tool, region-of-interest determination method, and observation method or inspection method using region-of-interest determination method | Ryo Nakagaki, Takehiro Hirai | 2016-05-10 |
| 9312099 | Charged particle beam device and method for analyzing defect therein | Satoshi Umehara, Naomasa Suzuki | 2016-04-12 |
| 9287082 | Charged particle beam apparatus | Kenichi Morita, Sayaka Tanimoto, Makoto Sakakibara, Muneyuki Fukuda, Naomasa Suzuki | 2016-03-15 |
| 9280814 | Charged particle beam apparatus that performs image classification assistance | Takehiro Hirai, Kozo Miyake | 2016-03-08 |
| 9177757 | Charged particle beam apparatus | Naoma Ban, Takehiro Hirai | 2015-11-03 |
| 9136189 | Surface observation apparatus and surface observation method | Takehiro Hirai, Naoma Ban | 2015-09-15 |
| 8878925 | Observation method and observation device | Naoma Ban | 2014-11-04 |
| 8779360 | Charged particle beam device, defect observation device, and management server | Kozo Miyake, Junko Konishi, Takehiro Hirai | 2014-07-15 |
| 8731275 | Method and apparatus for reviewing defects | Minoru Harada, Ryo Nakagaki, Atsushi Miyamoto | 2014-05-20 |
| 8634634 | Defect observation method and defect observation apparatus | Minoru Harada, Ryo Nakagaki | 2014-01-21 |
| 8467595 | Defect review system and method, and program | Noritsugu Takahashi, Muneyuki Fukuda, Tomoyasu Shojo, Naomasa Suzuki | 2013-06-18 |
| 8428336 | Inspecting method, inspecting system, and method for manufacturing electronic devices | Yoko Ikeda, Junko Konishi, Hisafumi Iwata, Yuji Takagi, Ryo Nakagaki +2 more | 2013-04-23 |
| 8355559 | Method and apparatus for reviewing defects | Minoru Harada, Ryo Nakagaki, Atsushi Miyamoto | 2013-01-15 |
| 8309919 | Inspection method for semiconductor wafer and apparatus for reviewing defects | Takehiro Hirai | 2012-11-13 |
| 8280148 | Pattern defect analysis equipment, pattern defect analysis method and pattern defect analysis program | Norio Satou, Susumu Koyama, Masashi Sakamoto | 2012-10-02 |
| 8188428 | Scanning electron microscope | Kohei Yamaguchi | 2012-05-29 |
| 8139847 | Defect inspection tool and method of parameter tuning for defect inspection tool | Kohei Yamaguchi, Takehiro Hirai | 2012-03-20 |
| 8121393 | Pattern defect analysis equipment, pattern defect analysis method and pattern defect analysis program | Norio Satou, Susumu Koyama, Masashi Sakamoto | 2012-02-21 |
| 8121397 | Method and its apparatus for reviewing defects | Minoru Harada, Ryo Nakagaki | 2012-02-21 |
| 8108172 | Defect review apparatus and method of reviewing defects | Takehiro Hirai, Kohei Yamaguchi | 2012-01-31 |
| 8013299 | Review method and review device | Takehiro Hirai, Kohei Yamaguchi, Naoma Ban | 2011-09-06 |
| 7932493 | Method and system for observing a specimen using a scanning electron microscope | Minoru Harada, Ryo Nakagaki | 2011-04-26 |