Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211224 | Charged particle beam apparatus | Nobuhiro Okai, Daisuke Bizen, Naomasa Suzuki, Muneyuki Fukuda | 2021-12-28 |
| 10121632 | Charged particle beam apparatus | Nobuhiro Okai, Natsuki Tsuno, Naomasa Suzuki | 2018-11-06 |
| 9799483 | Charged particle beam device and detection method using said device | Hajime Kawano, Yasunari Sohda | 2017-10-24 |
| 9384940 | Charged particle beam apparatus | Muneyuki Fukuda, Naomasa Suzuki, Akira Ikegami, Hideto Dohi, Momoyo Enyama | 2016-07-05 |
| 9159533 | Charged particle beam apparatus permitting high-resolution and high-contrast observation | Muneyuki Fukuda, Naomasa Suzuki, Noritsugu Takahashi | 2015-10-13 |
| 8859962 | Charged-particle microscope | Noritsugu Takahashi, Muneyuki Fukuda, Manabu Yano, Hirohiko Kitsuki, Kazunari Asao | 2014-10-14 |
| 8841612 | Charged particle beam microscope | Muneyuki Fukuda, Naomasa Suzuki, Noritsugu Takahashi, Hiroshi Suzuki, Hiroshi Makino | 2014-09-23 |
| 8785890 | Charged particle beam apparatus permitting high-resolution and high-contrast observation | Muneyuki Fukuda, Naomasa Suzuki, Noritsugu Takahashi | 2014-07-22 |
| 8467595 | Defect review system and method, and program | Noritsugu Takahashi, Muneyuki Fukuda, Naomasa Suzuki, Kenji Obara | 2013-06-18 |
| 8431893 | Electron beam apparatus and electron beam inspection method | Muneyuki Fukuda, Mitsugu Sato, Atsuko Fukada, Naomasa Suzuki, Ichiro Tachibana | 2013-04-30 |
| 8431915 | Charged particle beam apparatus permitting high resolution and high-contrast observation | Muneyuki Fukuda, Naomasa Suzuki, Noritsugu Takahashi | 2013-04-30 |
| 8405026 | Charged particle beam apparatus | Muneyuki Fukuda, Naomasa Suzuki, Noritsugu Takahashi | 2013-03-26 |
| 8389935 | Charged particle beam apparatus permitting high-resolution and high-contrast observation | Muneyuki Fukuda, Naomasa Suzuki, Noritsugu Takahashi | 2013-03-05 |
| 8207498 | Electron beam apparatus and electron beam inspection method | Muneyuki Fukuda, Mitsugu Sato, Atsuko Fukada, Naomasa Suzuki, Ichiro Tachibana | 2012-06-26 |
| 8026481 | Charged particle apparatus, scanning electron microscope, and sample inspection method | Muneyuki Fukuda, Atsuko Fukada, Noritsugu Takahashi | 2011-09-27 |
| 7875849 | Electron beam apparatus and electron beam inspection method | Muneyuki Fukuda, Mitsugu Sato, Atsuko Fukada, Naomasa Suzuki, Ichiro Tachibana | 2011-01-25 |
| 7557347 | Charged particle beam apparatus, scanning electron microscope, and sample observation method using the same | Muneyuki Fukuda, Naomasa Suzuki | 2009-07-07 |