Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11456150 | Charged particle beam device | Kaori Bizen, Yuzuru Mizuhara, Minoru Yamazaki, Daisuke Bizen | 2022-09-27 |
| 11276551 | Inspection device | Atsuko Shintani, Yasunari Sohda, Hikaru Koyama | 2022-03-15 |
| 11257658 | Charged particle beam apparatus | Makoto Sakakibara, Makoto Suzuki, Minoru Yamazaki | 2022-02-22 |
| 10707047 | Measuring device and measuring method | Makoto Sakakibara, Wataru MORI, Hajime Kawano, Yuko Sasaki | 2020-07-07 |
| 10559450 | Scanning electron microscope | Yasunari Sohda, Akira Ikegami, Yuta Kawamoto | 2020-02-11 |
| 10134558 | Scanning electron microscope | Yasunari Sohda, Takeyoshi Ohashi, Takafumi Miwa, Hajime Kawano | 2018-11-20 |
| 9960006 | Charged-particle-beam device | Yasunari Sohda, Wataru MORI, Yuko Sasaki, Hajime Kawano | 2018-05-01 |
| 9443695 | Charged-particle beam device | Takeyoshi Ohashi, Yasunari Sohda, Hajime Kawano, Osamu Komuro | 2016-09-13 |
| 9312091 | Charged particle beam apparatus | Yasunari Sohda, Tasuku Yano, Muneyuki Fukuda, Hajime Kawano, Hiroyuki Ito | 2016-04-12 |
| 9230775 | Charged particle instrument | Takeyoshi Ohashi, Yasunari Sohda, Makoto Ezumi, Muneyuki Fukuda | 2016-01-05 |
| 9159533 | Charged particle beam apparatus permitting high-resolution and high-contrast observation | Muneyuki Fukuda, Naomasa Suzuki, Tomoyasu Shojo | 2015-10-13 |
| 8859962 | Charged-particle microscope | Muneyuki Fukuda, Manabu Yano, Hirohiko Kitsuki, Kazunari Asao, Tomoyasu Shojo | 2014-10-14 |
| 8841612 | Charged particle beam microscope | Muneyuki Fukuda, Naomasa Suzuki, Tomoyasu Shojo, Hiroshi Suzuki, Hiroshi Makino | 2014-09-23 |
| 8785890 | Charged particle beam apparatus permitting high-resolution and high-contrast observation | Muneyuki Fukuda, Naomasa Suzuki, Tomoyasu Shojo | 2014-07-22 |
| 8735814 | Electron beam device | Yasunari Sohda, Takeyoshi Ohashi, Tasuku Yano, Muneyuki Fukuda | 2014-05-27 |
| 8467595 | Defect review system and method, and program | Muneyuki Fukuda, Tomoyasu Shojo, Naomasa Suzuki, Kenji Obara | 2013-06-18 |
| 8431915 | Charged particle beam apparatus permitting high resolution and high-contrast observation | Muneyuki Fukuda, Naomasa Suzuki, Tomoyasu Shojo | 2013-04-30 |
| 8405026 | Charged particle beam apparatus | Tomoyasu Shojo, Muneyuki Fukuda, Naomasa Suzuki | 2013-03-26 |
| 8389935 | Charged particle beam apparatus permitting high-resolution and high-contrast observation | Muneyuki Fukuda, Naomasa Suzuki, Tomoyasu Shojo | 2013-03-05 |
| 8209135 | Wafer inspection data handling and defect review tool | Tomohiro Funakoshi, Junko Konishi, Yuko Kariya, Fumiaki Endo | 2012-06-26 |
| 8153969 | Inspection method and inspection system using charged particle beam | Atsuko Fukada, Mitsugu Sato, Naomasa Suzuki, Hidetoshi Nishiyama, Muneyuki Fukuda | 2012-04-10 |
| 8026481 | Charged particle apparatus, scanning electron microscope, and sample inspection method | Muneyuki Fukuda, Tomoyasu Shojo, Atsuko Fukada | 2011-09-27 |
| 7956324 | Charged particle beam apparatus for forming a specimen image | Muneyuki Fukuda, Hideo Todokoro, Mitsugu Sato | 2011-06-07 |
| 7847249 | Charged particle beam apparatus | Muneyuki Fukuda, Hiroyuki Ito, Atsuko Fukada, Masashi Sakamoto, Satoshi Takada | 2010-12-07 |
| 7462828 | Inspection method and inspection system using charged particle beam | Atsuko Fukada, Mitsugu Sato, Naomasa Suzuki, Hidetoshi Nishiyama, Muneyuki Fukuda | 2008-12-09 |