Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9644955 | Scanning electron beam device with focus adjustment based on acceleration voltage and dimension measurement method using same | Yasunari Sohda, Muneyuki Fukuda, Katsunori Onuki, Hajime Kawano, Naomasa Suzuki | 2017-05-09 |
| 9312091 | Charged particle beam apparatus | Yasunari Sohda, Muneyuki Fukuda, Noritsugu Takahashi, Hajime Kawano, Hiroyuki Ito | 2016-04-12 |
| 8735814 | Electron beam device | Yasunari Sohda, Takeyoshi Ohashi, Muneyuki Fukuda, Noritsugu Takahashi | 2014-05-27 |
| 7928384 | Localized static charge distribution precision measurement method and device | Zhaohui Cheng, Seiko Omori | 2011-04-19 |
| 7714288 | Charged particle beam apparatus | Zhaohui Cheng, Takashi Furukawa, Osamu Nasu | 2010-05-11 |