Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068128 | Charged particle beam system | Yusuke Nakamura, Yusuke Abe, Kenji Tanimoto | 2024-08-20 |
| 11670479 | Electron microscope and method of adjusting focus of electron microscope | Hyejin Kim, Yusuke Abe, Kenji Tanimoto | 2023-06-06 |
| 11430106 | Image processing device, image processing method and charged particle microscope | Atsuko Shintani, Masami Ikota, Kazuhisa Hasumi | 2022-08-30 |
| 11276554 | Scanning electron microscope and method for measuring pattern | Yusuke Abe, Kenji Tanimoto, Kaori Bizen, Hyejin Kim | 2022-03-15 |
| 10943762 | Inspection system, image processing device and inspection method | Masami Ikota | 2021-03-09 |
| 10727024 | Charged particle beam device and aberration correction method for charged particle beam device | Kotoko Urano, Zhaohui Cheng, Hideyuki Kazumi | 2020-07-28 |
| 10446361 | Aberration correction method, aberration correction system, and charged particle beam apparatus | Zhaohui Cheng, Tomonori Nakano, Kotoko Urano, Yasunari Sohda, Hideyuki Kazumi | 2019-10-15 |
| 10134558 | Scanning electron microscope | Yasunari Sohda, Takafumi Miwa, Noritsugu Takahashi, Hajime Kawano | 2018-11-20 |
| 9830524 | Method for estimating shape before shrink and CD-SEM apparatus | Tomoko Sekiguchi, Junichi Tanaka, Zhaohui Cheng, Ruriko Tsuneta, Hiroki Kawada +1 more | 2017-11-28 |
| 9543053 | Electron beam equipment | Yasunari Sohda, Takafumi Miwa, Hajime Kawano | 2017-01-10 |
| 9536170 | Measurement method, image processing device, and charged particle beam apparatus | Junichi Tanaka, Yutaka Hojo, Hiroyuki Shindo, Hiroki Kawada | 2017-01-03 |
| 9443695 | Charged-particle beam device | Yasunari Sohda, Noritsugu Takahashi, Hajime Kawano, Osamu Komuro | 2016-09-13 |
| 9305744 | Measuring method, data processing apparatus and electron microscope using same | Junichi Tanaka, Tomoko Sekiguchi, Hiroki Kawada | 2016-04-05 |
| 9287084 | Aberration corrector and charged particle beam apparatus using the same | Zhaohui Cheng, Hideo Kashima, Hiroaki Baba, Tomonori Nakano, Kotoko Urano +1 more | 2016-03-15 |
| 9230775 | Charged particle instrument | Yasunari Sohda, Makoto Ezumi, Muneyuki Fukuda, Noritsugu Takahashi | 2016-01-05 |
| 9129775 | Specimen potential measuring method, and charged particle beam device | Tatsuaki Ishijima, Osamu Nasu, Muneyuki Fukuda, Hiromasa Yamanashi, Takuji Miyamoto +1 more | 2015-09-08 |
| 8816277 | Pattern evaluation method, device therefor, and electron beam device | Hiromasa Yamanashi, Yasunari Sohda, Muneyuki Fukuda | 2014-08-26 |
| 8735814 | Electron beam device | Yasunari Sohda, Tasuku Yano, Muneyuki Fukuda, Noritsugu Takahashi | 2014-05-27 |
| 8704175 | Scanning electron microscope | Yasunari Sohda, Hiromasa Yamanashi, Muneyuki Fukuda, Osamu Komuro | 2014-04-22 |
| 8637820 | Scanning electron microscope and inspection method using same | Yasunari Sohda, Kaori Shirahata, Keiichiro Hitomi | 2014-01-28 |