Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10361063 | Charged particle detector and charged particle beam device using the same | Yasuhiro Shirasaki, Momoyo Enyama, Makoto Sakakibara | 2019-07-23 |
| 10014160 | Scanning electron microscope and method for controlling same | Daisuke Bizen, Makoto Sakakibara, Yasunari Sohda, Hajime Kawano, Hideyuki Kazumi | 2018-07-03 |
| 9520266 | Pattern critical dimension measurement equipment and method for measuring pattern critical dimension | Yasunari Sohda, Makoto Sakakibara, Daisuke Bizen, Hajime Kawano, Hideyuki Kazumi | 2016-12-13 |
| 8637820 | Scanning electron microscope and inspection method using same | Yasunari Sohda, Takeyoshi Ohashi, Keiichiro Hitomi | 2014-01-28 |
| 8478021 | Charged beam device | Yoshinori Nakayama, Keiichiro Hitomi, Muneyuki Fukuda, Yasunari Sohda | 2013-07-02 |