Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406826 | Charged particle beam device and sample observation method | Natsuki Tsuno, Yasuhiro Shirasaki, Yohei Nakamura, Satoshi Takada | 2025-09-02 |
| 12191111 | Charged particle beam system and method for determining observation conditions in charged particle beam device | Fumiya Ishizaka, Makoto Suzuki | 2025-01-07 |
| 12181513 | Inspection method | Shota Mitsugi, Yohei Nakamura, Junichi FUSE, Satoshi Takada, Natsuki Tsuno | 2024-12-31 |
| 11869745 | Charged particle beam device | Minami Shouji, Natsuki Tsuno, Hiroya Ohta | 2024-01-09 |
| 11610756 | Charged particle beam apparatus and control method | Kaori Bizen, Ryota Watanabe, Yuzuru Mizuhara | 2023-03-21 |
| 11456150 | Charged particle beam device | Kaori Bizen, Yuzuru Mizuhara, Minoru Yamazaki, Noritsugu Takahashi | 2022-09-27 |
| 11282671 | Charged-particle beam apparatus | Uki Ikeda, Makoto Sakakibara, Makoto Suzuki | 2022-03-22 |
| 11211224 | Charged particle beam apparatus | Nobuhiro Okai, Tomoyasu Shojo, Naomasa Suzuki, Muneyuki Fukuda | 2021-12-28 |
| 11211226 | Pattern cross-sectional shape estimation system and program | Toshiyuki Yokosuka, Hirohiko Kitsuki, Makoto Suzuki, Yusuke Abe, Kenji Yasui +2 more | 2021-12-28 |
| 11164720 | Scanning electron microscope and calculation method for three-dimensional structure depth | Kenji Yasui, Mayuka Osaki, Makoto Suzuki, Hirohiko Kitsuki, Toshiyuki Yokosuka +1 more | 2021-11-02 |
| 11011348 | Scanning electron microscope and sample observation method using scanning electron microscope | Natsuki Tsuno, Takafumi Miwa, Makoto Sakakibara, Toshiyuki Yokosuka, Hideyuki Kazumi | 2021-05-18 |
| 10825649 | Electron beam device | Yasunari Sohda, Makoto Sakakibara | 2020-11-03 |
| 10338367 | Scanning microscope with controlled variable measurement parameters | Ryoko Araki, Hyejin Kim | 2019-07-02 |
| 10262830 | Scanning electron microscope and electron trajectory adjustment method therefor | Hideo Morishita, Michio Hatano, Hiroya Ohta | 2019-04-16 |
| 10217604 | Charged particle beam apparatus | Makoto Sakakibara, Hajime Kawano, Makoto Suzuki, Yuji Kasai, Yoshinori Momonoi | 2019-02-26 |
| 10014160 | Scanning electron microscope and method for controlling same | Kaori Shirahata, Makoto Sakakibara, Yasunari Sohda, Hajime Kawano, Hideyuki Kazumi | 2018-07-03 |
| 9966225 | Charged particle beam device, simulation method, and simulation device | Makoto Sakakibara, Hiroya Ohta, Junichi Tanaka | 2018-05-08 |
| 9520266 | Pattern critical dimension measurement equipment and method for measuring pattern critical dimension | Kaori Shirahata, Yasunari Sohda, Makoto Sakakibara, Hajime Kawano, Hideyuki Kazumi | 2016-12-13 |
| 9336984 | Charged particle beam device and measuring method using the same | Hajime Kawano, Hideyuki Kazumi | 2016-05-10 |