Issued Patents All Time
Showing 1–25 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852599 | Image processing system | Nobuhiro Okai, Muneyuki Fukuda | 2023-12-26 |
| 11239042 | Beam irradiation device | Akira Ikegami, Yuta Kawamoto, Manabu Yano, Yasushi Ebizuka, Naoma Ban | 2022-02-01 |
| 11211224 | Charged particle beam apparatus | Nobuhiro Okai, Daisuke Bizen, Tomoyasu Shojo, Muneyuki Fukuda | 2021-12-28 |
| 10971328 | Charged particle beam device | Takanori Kishimoto, Ichiro Tachibana | 2021-04-06 |
| 10879037 | Charged particle beam device with distance setting between irradiation regions in a scan line | Natsuki Tsuno, Atsushi Okita, Muneyuki Fukuda | 2020-12-29 |
| 10832886 | Beam irradiation device | Akira Ikegami, Yuta Kawamoto, Manabu Yano, Yasushi Ebizuka, Naoma Ban | 2020-11-10 |
| 10734191 | Charged particle beam device | Takanori Kishimoto, Ichiro Tachibana | 2020-08-04 |
| 10269536 | Electron microscope | Satoshi Takada, Kazuo Aoki, Takehiko Konno, Takayuki Hoshino | 2019-04-23 |
| 10121632 | Charged particle beam apparatus | Nobuhiro Okai, Natsuki Tsuno, Tomoyasu Shojo | 2018-11-06 |
| 9704687 | Charged particle beam application device | Momoyo Enyama, Akira Ikegami, Hideto Dohi, Hideyuki Kazumi | 2017-07-11 |
| 9659744 | Charged particle beam apparatus and inspection method using the same | Natsuki Tsuno, Hideyuki Kazumi, Shoji Hotta, Yoshinobu Kimura | 2017-05-23 |
| 9653256 | Charged particle-beam device | Akira Ikegami, Hideto Dohi, Hideyuki Kazumi, Yoichi Ose, Momoyo Enyama +2 more | 2017-05-16 |
| 9644955 | Scanning electron beam device with focus adjustment based on acceleration voltage and dimension measurement method using same | Tasuku Yano, Yasunari Sohda, Muneyuki Fukuda, Katsunori Onuki, Hajime Kawano | 2017-05-09 |
| 9384940 | Charged particle beam apparatus | Muneyuki Fukuda, Akira Ikegami, Hideto Dohi, Momoyo Enyama, Tomoyasu Shojo | 2016-07-05 |
| 9324540 | Charged particle beam device | Ichiro Tachibana | 2016-04-26 |
| 9312099 | Charged particle beam device and method for analyzing defect therein | Kenji Obara, Satoshi Umehara | 2016-04-12 |
| 9287084 | Aberration corrector and charged particle beam apparatus using the same | Zhaohui Cheng, Hideo Kashima, Hiroaki Baba, Takeyoshi Ohashi, Tomonori Nakano +1 more | 2016-03-15 |
| 9287082 | Charged particle beam apparatus | Kenichi Morita, Sayaka Tanimoto, Makoto Sakakibara, Muneyuki Fukuda, Kenji Obara | 2016-03-15 |
| 9159533 | Charged particle beam apparatus permitting high-resolution and high-contrast observation | Muneyuki Fukuda, Tomoyasu Shojo, Noritsugu Takahashi | 2015-10-13 |
| 9123501 | Device for correcting diffraction aberration of electron beam | Muneyuki Fukuda, Yoichi Ose, Mitsugu Sato, Hiroyuki Ito, Hiroshi Suzuki | 2015-09-01 |
| 8841612 | Charged particle beam microscope | Muneyuki Fukuda, Tomoyasu Shojo, Noritsugu Takahashi, Hiroshi Suzuki, Hiroshi Makino | 2014-09-23 |
| 8785890 | Charged particle beam apparatus permitting high-resolution and high-contrast observation | Muneyuki Fukuda, Tomoyasu Shojo, Noritsugu Takahashi | 2014-07-22 |
| 8629410 | Charged particle radiation device | Hiroshi Tsuji, Kouji Ishiguro, Ichiro Tachibana, Katsunori Onuki | 2014-01-14 |
| 8519334 | Scanning electron microscope and sample observation method | Satoshi Tadaka, Naoma Ban, Tatsuichi Kato | 2013-08-27 |
| 8467595 | Defect review system and method, and program | Noritsugu Takahashi, Muneyuki Fukuda, Tomoyasu Shojo, Kenji Obara | 2013-06-18 |