Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354826 | Charged particle beam apparatus | Yu YAMAZAWA, Hideo Kashima | 2025-07-08 |
| 11069505 | Aberration corrector and electron microscope | — | 2021-07-20 |
| 11004650 | Multipole lens, aberration corrector using the same, and charged particle beam apparatus | — | 2021-05-11 |
| 10446361 | Aberration correction method, aberration correction system, and charged particle beam apparatus | Zhaohui Cheng, Kotoko Urano, Takeyoshi Ohashi, Yasunari Sohda, Hideyuki Kazumi | 2019-10-15 |
| 9530614 | Charged particle beam device and arithmetic device | Kotoko Urano, Yoichi Ose | 2016-12-27 |
| 9378703 | KVM switch and computer readable medium | — | 2016-06-28 |
| 9343260 | Multipole and charged particle radiation apparatus using the same | Kotoko Urano, Takeshi Kawasaki, Noboru Moriya | 2016-05-17 |
| 9287084 | Aberration corrector and charged particle beam apparatus using the same | Zhaohui Cheng, Hideo Kashima, Hiroaki Baba, Takeyoshi Ohashi, Kotoko Urano +1 more | 2016-03-15 |
| 8987680 | Multipole measurement apparatus | Kotoko Urano, Hiroyuki Ito | 2015-03-24 |
| 8772732 | Scanning charged particle beam device and method for correcting chromatic spherical combination aberration | Takeshi Kawasaki, Kotoko Hirose | 2014-07-08 |
| 8581190 | Charged particle beam apparatus and geometrical aberration measurement method therefor | Takeshi Kawasaki, Kotoko Hirose, Hiroyuki Ito | 2013-11-12 |
| 8558171 | Charged particle beam apparatus including aberration corrector | Kotoko Hirose, Takeshi Kawasaki | 2013-10-15 |
| 8436899 | Method and apparatus of tilted illumination observation | Takeshi Kawasaki, Kotoko Hirose | 2013-05-07 |
| 8258475 | Charged particle radiation device provided with aberration corrector | Kotoko Hirose, Takeshi Kawasaki | 2012-09-04 |
| 8168951 | Charged particle beam apparatus | Takeshi Kawasaki | 2012-05-01 |
| 8129680 | Charged particle beam apparatus including aberration corrector | Kotoko Hirose, Takeshi Kawasaki | 2012-03-06 |
| 7915582 | Method for estimation of probe shape in charged particle beam instruments | Kotoko Hirose, Takeshi Kawasaki, Haruo Yoda | 2011-03-29 |
| 7834326 | Aberration corrector and charged particle beam apparatus using the same | Takeshi Kawasaki, Noboru Moriya, Kotoko Hirose | 2010-11-16 |
| 7718976 | Charged particle beam apparatus | Takeshi Kawasaki, Mitsugu Sato, Makoto Ezumi | 2010-05-18 |
| 7714286 | Charged particle beam apparatus, aberration correction value calculation unit therefor, and aberration correction program therefor | Takeshi Kawasaki, Kotoko Hirose, Makoto Ezumi | 2010-05-11 |
| 7619218 | Charged particle optical apparatus with aberration corrector | Takaho Yoshida | 2009-11-17 |
| 7531799 | Charged particle beam column | Takeshi Kawasaki, Takaho Yoshida | 2009-05-12 |
| 7521675 | Charged particle beam apparatus | Takeshi Kawasaki | 2009-04-21 |
| 7504624 | Charged particle beam device | Takeshi Kawasaki, Michio Hatano, Momoyo Enyama | 2009-03-17 |
| 7223983 | Charged particle beam column | Takeshi Kawasaki, Takaho Yoshida | 2007-05-29 |