Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380518 | Measurement system and method for setting observation conditions of measurement apparatus | Takafumi Miwa, Hirokazu Tamaki, Momoyo Enyama, Makoto Sakakibara, Sayaka KURATA +6 more | 2022-07-05 |
| 10727024 | Charged particle beam device and aberration correction method for charged particle beam device | Zhaohui Cheng, Takeyoshi Ohashi, Hideyuki Kazumi | 2020-07-28 |
| 10446361 | Aberration correction method, aberration correction system, and charged particle beam apparatus | Zhaohui Cheng, Tomonori Nakano, Takeyoshi Ohashi, Yasunari Sohda, Hideyuki Kazumi | 2019-10-15 |
| 9530614 | Charged particle beam device and arithmetic device | Tomonori Nakano, Yoichi Ose | 2016-12-27 |
| 9343260 | Multipole and charged particle radiation apparatus using the same | Takeshi Kawasaki, Noboru Moriya, Tomonori Nakano | 2016-05-17 |
| 9287084 | Aberration corrector and charged particle beam apparatus using the same | Zhaohui Cheng, Hideo Kashima, Hiroaki Baba, Takeyoshi Ohashi, Tomonori Nakano +1 more | 2016-03-15 |
| 8987680 | Multipole measurement apparatus | Tomonori Nakano, Hiroyuki Ito | 2015-03-24 |