Issued Patents All Time
Showing 1–25 of 76 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11435178 | Calibration sample, electron beam adjustment method and electron beam apparatus using same | Yoshinori Nakayama, Kaori Bizen, Hiroya Ohta, Yusuke Abe | 2022-09-06 |
| 11276551 | Inspection device | Atsuko Shintani, Noritsugu Takahashi, Hikaru Koyama | 2022-03-15 |
| 11251018 | Scanning electron microscope | Kaori Bizen, Yusuke Abe, Kenji Tanimoto | 2022-02-15 |
| 11227740 | Electron gun and electron beam application device | Soichiro Matsunaga, Souichi Katagiri, Makoto Sakakibara, Hajime Kawano, Takashi Doi | 2022-01-18 |
| 10825649 | Electron beam device | Daisuke Bizen, Makoto Sakakibara | 2020-11-03 |
| 10692693 | System and method for measuring patterns | Wei Sun, Taku Ninomiya, Yasunori Goto | 2020-06-23 |
| 10636618 | Charged particle beam apparatus | Kaori Bizen, Makoto Sakakibara, Hiroya Ohta, Kenji Tanimoto, Yusuke Abe | 2020-04-28 |
| 10629405 | Electron beam device and sample inspection method | Momoyo Enyama, Megumi Kimura, Koichi Hamada | 2020-04-21 |
| 10559450 | Scanning electron microscope | Noritsugu Takahashi, Akira Ikegami, Yuta Kawamoto | 2020-02-11 |
| 10446361 | Aberration correction method, aberration correction system, and charged particle beam apparatus | Zhaohui Cheng, Tomonori Nakano, Kotoko Urano, Takeyoshi Ohashi, Hideyuki Kazumi | 2019-10-15 |
| 10134558 | Scanning electron microscope | Takeyoshi Ohashi, Takafumi Miwa, Noritsugu Takahashi, Hajime Kawano | 2018-11-20 |
| 10014160 | Scanning electron microscope and method for controlling same | Kaori Shirahata, Daisuke Bizen, Makoto Sakakibara, Hajime Kawano, Hideyuki Kazumi | 2018-07-03 |
| 9960006 | Charged-particle-beam device | Noritsugu Takahashi, Wataru MORI, Yuko Sasaki, Hajime Kawano | 2018-05-01 |
| 9799483 | Charged particle beam device and detection method using said device | Tomoyasu Shojo, Hajime Kawano | 2017-10-24 |
| 9644955 | Scanning electron beam device with focus adjustment based on acceleration voltage and dimension measurement method using same | Tasuku Yano, Muneyuki Fukuda, Katsunori Onuki, Hajime Kawano, Naomasa Suzuki | 2017-05-09 |
| 9543053 | Electron beam equipment | Takeyoshi Ohashi, Takafumi Miwa, Hajime Kawano | 2017-01-10 |
| 9520266 | Pattern critical dimension measurement equipment and method for measuring pattern critical dimension | Kaori Shirahata, Makoto Sakakibara, Daisuke Bizen, Hajime Kawano, Hideyuki Kazumi | 2016-12-13 |
| 9443695 | Charged-particle beam device | Takeyoshi Ohashi, Noritsugu Takahashi, Hajime Kawano, Osamu Komuro | 2016-09-13 |
| 9312091 | Charged particle beam apparatus | Tasuku Yano, Muneyuki Fukuda, Noritsugu Takahashi, Hajime Kawano, Hiroyuki Ito | 2016-04-12 |
| 9261360 | Charged particle beam microscope | Nobuhiro Okai, Junichi Tanaka | 2016-02-16 |
| 9230775 | Charged particle instrument | Takeyoshi Ohashi, Makoto Ezumi, Muneyuki Fukuda, Noritsugu Takahashi | 2016-01-05 |
| 9000366 | Method and apparatus for measuring displacement between patterns and scanning electron microscope installing unit for measuring displacement between patterns | Atsuko Yamaguchi, Tatsuya Maeda, Osamu Nasu, Hiroki Kawada | 2015-04-07 |
| 8969801 | Scanning electron microscope | Nobuhiro Okai, Ritsuo Fukaya, Zhigang Wang | 2015-03-03 |
| 8816277 | Pattern evaluation method, device therefor, and electron beam device | Hiromasa Yamanashi, Takeyoshi Ohashi, Muneyuki Fukuda | 2014-08-26 |
| 8766183 | Charged particle beam device | Muneyuki Fukuda, Hiromasa Yamanashi | 2014-07-01 |