Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515121 | Electron beam device | Tomohiko Ogata, Hisaya Murakoshi, Masaki Hasegawa, Noriyuki Kaneoka | 2022-11-29 |
| 11193895 | Semiconductor substrate for evaluation and method using same to evaluate defect detection sensitivity of inspection device | Kentaro OHIRA, Masaki Hasegawa, Tomohiko Ogata, Noriyuki Kaneoka | 2021-12-07 |
| 11107655 | Charged particle beam device | Tomohiko Ogata, Masaki Hasegawa, Noriyuki Kaneoka, Hisaya Murakoshi | 2021-08-31 |
| 11002687 | Defect inspection method and defect inspection device | Masaki Hasegawa, Noriyuki Kaneoka, Hisaya Murakoshi, Tomohiko Ogata | 2021-05-11 |
| 10923315 | Charged particle beam apparatus, and method of adjusting charged particle beam apparatus | Masaki Hasegawa, Tomohiko Ogata, Noriyuki Kaneoka, Hisaya Murakoshi | 2021-02-16 |
| 10522320 | Charged particle beam device and method for adjusting charged particle beam device | Tomohiko Ogata, Masaki Hasegawa, Hisaya Murakoshi, Noriyuki Kaneoka | 2019-12-31 |
| 10290522 | Conductive interface system between vacuum chambers in a charged particle beam device | Masashi Fujita, Masahiro Tsunoda, Katsuya Aibara, Seiichi Shindo, Takaaki Nishimori | 2019-05-14 |
| 10056226 | Charged particle beam apparatus and vibration damper for charged particle beam apparatus | Motohiro TAKAHASHI, Yoshimasa Fukushima, Tetsuya Niibori | 2018-08-21 |
| 9644955 | Scanning electron beam device with focus adjustment based on acceleration voltage and dimension measurement method using same | Tasuku Yano, Yasunari Sohda, Muneyuki Fukuda, Hajime Kawano, Naomasa Suzuki | 2017-05-09 |
| 8823309 | Stage device | Hironori Ogawa, Masahiro Koyama, Nobuo Shibata, Masaru Matsushima, Shuichi Nakagawa +1 more | 2014-09-02 |
| 8629410 | Charged particle radiation device | Hiroshi Tsuji, Kouji Ishiguro, Ichiro Tachibana, Naomasa Suzuki | 2014-01-14 |
| 8052530 | Network game system, game machine, game machine control method, and information storage medium | Ken-Ichi Goto, Shin Tsuchiya, Toshikazu Munemasa | 2011-11-08 |
| 8052531 | Network game system, game machine, game machine control method, and information storage medium | Ken-Ichi Goto, Shin Tsuchiya, Toshikazu Munemasa, Takeshi Hasegawa | 2011-11-08 |
| 8047918 | Network game system, game machine, game machine control method, and information storage medium | Ken-Ichi Goto, Shin Tsuchiya, Toshikazu Munemasa | 2011-11-01 |
| 7284906 | Exhaust apparatus and control method for same, and vacuum-use hydrostatic bearing | Keiji Emoto | 2007-10-23 |
| 5214493 | Reduction exposure apparatus with correction for alignment light having inhomogeneous intensity distribution | Shuji Sugiyama, Yoshimitsu Saze | 1993-05-25 |